Abstract
Significant adhesion forces (van der Waals, electrostatic, and capillary) exist at the nanoscale. Knowing the effective forces and influencing factors is crucial to reduce the adhesion force in microelectromechanical systems. In this paper, the effect of silver and gold metal coating in various thicknesses on silicon surfaces' adhesion force was investigated. Silver and gold metals with a thickness of 10, 120, and 500 nm were coated on the silicon substrate <100> by the magnetron sputtering method. Adhesion forces were obtained via Rabinovitch modeling and experimental method. Atomic force microscopy was used to experimentally obtain data on modeling methods. The findings show that coatings of both metals with various thicknesses reduce the adhesion force. Gold further reduced the surface adhesion as compared with the silver and gold coating. Therefore, gold can be a better option for the coating to reduce the adhesion force, especially in applications such as micro assembly.
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Molaei, B., Kolahdoozan, M. Investigation of Adhesion Force of Silver and Gold-Coated Surfaces with Different Thicknesses on Silicon Substrate. J. of Materi Eng and Perform (2023). https://doi.org/10.1007/s11665-023-08652-4
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DOI: https://doi.org/10.1007/s11665-023-08652-4