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Mechanical and Frictional Performance of Ta and Ta-Ag Alloy Films Deposited at Different Sputtering Powers

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Abstract

The mechanical and tribological properties of tantalum and its alloy films are greatly influenced by their phase transformation. In this study, Ta and Ta-Ag films were prepared on carbon steel substrate by DC magnetron sputtering with various sputtering powers. The amorphous and nanocrystalline Ta and Ta-Ag film were produced at different sputtering powers from 40 to 110 W. The frictional properties of Ta and Ta-Ag films were investigated by rubbing against Si3N4 ball from RT to 700 °C. The nanocrystalline Ta-Ag films shows higher hardness values (12 GPa) compared with amorphous phase. The nanocrystalline Ta90-Ag8 film shows a low friction coefficient of about 0.20-0.30 when rubbing against Si3N4 ball at 700 °C. The segregation of Ag can effectively reduce friction coefficients of Ta-Ag film at 700 °C. The Ta-Ag films show high structure stability even after friction at 700 °C.

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Acknowledgments

This work is financially supported by Natural Science Foundation of China (No. 51101087), China Postdoctoral Science Foundation (Nos. 2013M540450, 2014T70520), and Fundamental Research Funds for the Central Universities (No. 30917014106).

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Authors and Affiliations

  1. School of Materials Science and Engineering, Nanjing University of Science and Technology, Nanjing, 210094, China

    Jianliang Li, Xiafei Zhang, Jun Wang, Hang Li, Jiewen Huang, Heguo Zhu & Dangsheng Xiong

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  1. Jianliang Li
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  2. Xiafei Zhang
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Li, J., Zhang, X., Wang, J. et al. Mechanical and Frictional Performance of Ta and Ta-Ag Alloy Films Deposited at Different Sputtering Powers. J. of Materi Eng and Perform 28, 5037–5046 (2019). https://doi.org/10.1007/s11665-019-04234-5

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  • DOI: https://doi.org/10.1007/s11665-019-04234-5

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