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Atomic Layer-Deposited TiO2 Coatings on NiTi Surface


NiTi shape-memory alloys may release poisonous Ni ions at the alloys’ surface. In an attempt to prepare a well-performing surface layer on an NiTi sample, the thermally grown TiO2 layer, which formed during the heat treatment of NiTi, was removed and replaced with a new TiO2 layer prepared using the atomic layer deposition (ALD) method. Using x-ray photoelectron spectroscopy, it was found that the ALD layer prepared at as low a temperature as 100 °C contained Ti in oxidation states + 4 and + 3. As for static corrosion properties of the ALD-coated NiTi samples, they further improved compared to those covered by thermally grown oxide. The corrosion rate of samples with thermally grown oxide was 1.05 × 10−5 mm/year, whereas the corrosion rate of the ALD-coated samples turned out to be about five times lower. However, cracking of the ALD coating occurred at about 1.5% strain during the superelastic mechanical loading in tension taking place via the propagation of a localized martensite band.

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The work conducted in the Czech Republic and in Taiwan was supported by the Academy of Sciences of the Czech Republic and the Ministry of Science and Technology, R.O.C. within a Czech–Taiwanese Joint Research Project Nos. MOST-15-01 and MOST-17-04. The support of the work of P. Šittner under the Czech Science Foundation via Project AdMat 14-36566G is also gratefully acknowledged.

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Vokoun, D., Racek, J., Kadeřávek, L. et al. Atomic Layer-Deposited TiO2 Coatings on NiTi Surface. J. of Materi Eng and Perform 27, 572–579 (2018).

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  • atomic layer deposition
  • corrosion
  • mechanical tests
  • NiTi
  • SEM
  • TiO2