Investigation of Pt and Pd Modified WO3 and ZnO Based Thin Film Sensors for Ethanol Sensing
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Ethanol sensors based on different WO3 and ZnO structures are studied in the present work. The XRD and SEM processes are used to characterize the sensing layer’s surface morphology which reveals the presence of nanoparticle in sensing layer. Further reducing the nanoparticle diameter by the addition of palladium (Pd) and platinum (Pt) for both the sensors (ZnO and WO3) gives good results on sensitivity, operating temperature, response time and recovery time. Nanoparticle diameter for undoped WO3, Pd-modified WO3 and Pt-modified WO3 based sensors is 11.8, 6 and 5.4 nm, whereas nanoparticle diameter for undoped, Pd-modified and Pt-modified ZnO based sensors is 20, 14 and 11 nm, respectively. Analysis of dynamic response of the sensors when exposed to different concentrations of ethanol vapour (from 500 to 10,000 ppm) and various temperatures indicate the improvement in sensitivity up to 77.2% for WO3 and 74.6% for ZnO based sensors.
Keywordsmicroscopy nanomaterials nanoprocessing Pd Pt semiconductors WO3 ZnO
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