Electrical characteristics of rectifying polycrystalline silicon/silicon carbide heterojunctions

Abstract

This paper presents a study of the rectifying properties of heavily doped polycrystalline silicon (polysilicon) on 4H silicon carbide (4H-SiC). Current properties and barrier heights were found using analysis of the heterojunction. This revealed that Schottky analysis would be valid for the large barrier height devices. Isotype and an-isotype devices were fabricated on both p-type and n-type SiC and the electrical characteristics were investigated using capacitance vs voltage measurements, current vs voltage measurements (I-V), and temperature I-V measurements. Extraction of the barrier height, built-in potential, and Richardson constant were made and then compared to theoretical values for the heterojunction. Temperature I-V measurements demonstrated that the current transport mechanism is thermionic emission, confirming the validity of the Schottky diode model. The I-V characteristics show near ideal diode rectifying behavior and the capacitance-voltage characteristics show ideal junction space charge modulation for all polysilicon/SiC combinations. These experimental results match well with heterojunction band-offset estimated barrier heights and demonstrate that the barrier height of the polysilicon/4H SiC interface may be controlled by varying the polysilicon doping type.