Abstract
Undoped semi-insulating (SI) InP samples, subjected to one-step and multi-step wafer annealing, and lightly and normally Fe-doped SI InP samples without annealing have been characterized by thermally stimulated current (TSC) spectroscopy. A dominant deep center at 0.63 eV is found in all samples and is undoubtedly due to iron. Two prominent TSC traps, Tb (0.44 eV) and Td (0.33 eV), found in undoped SI InP, are thought to be related to the phosphorus antisite PIn, and traps at low temperatures, like Te* (0.19 eV), to the phosphrus vacancy VP.
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A. Seidl, F. Mosel, J. Friedrich, U. Kretzer and G. Muller, Mater. Sci. & Engr. B 21, 321 (1993).
D.E. Holmes, R.G. Wilson and P.W. Yu, Appl. Phys. 52, 3396 (1981).
K. Kainosho, H. Shimakura, H. Yamamoto, T. Inoue and O. Oda, Proc. First Intl. Conf. InP and Related Materials, (Oklahoma, 1989), p. 312.
K. Kainosho, H. Shimakura, H. Yamamoto and O. Oda, Appl. Phys. Lett. 59, 932 (1991).
D.C. Look, Z.-Q. Fang, J.W. Hemsky and P. Kengkan, Phys. Rev. B 55, 2214 (1997).
S. Kuisma, K. Saarinen, P. Hautojarvi, Z-Q. Fang and D.C. Look, J. Appl. Phys. 81, 3512 (1997).
Z.-Q. Fang, D.C. Look and J.H. Zhao, Appl. Phys. Lett. 61, 589 (1992).
R. Fornari, B. Santic and U. Desnica, Proc. 4th Intl. Conf. InP and Related Materials, 1992, Newport, USA (New York:IEEE), p. 511.
K. Kuriyama, K. Tomizawa, M. Kashiwakura and K. Yokoyama, J. Appl. Phys. 76, 3552 (1994).
M. Uchida, K. Kainosho, M. Ohta and O. Oda, J. Electron. Mater. 27, 8 (1998).
T. Takanohashi and K. Nakajima, J. Appl. Phys. 65, 3933 (1989).
D. C. Look, Semiconductors and Semimetals, 19, ed. R.K. Willardson and A.C. Beer (New York: Academic Press, 1983), p. 75.
F.X. Zach, J. Appl. Phys. 75, 7894 (1994).
Not published.
G. Hirt, T. Mono and G. Muller, Mater. Sci. and Engr. B 28, 101 (1994).
P. Dreszer, W.M. Chen, D. Wasik, R. Leon, W. Walukiewicz, B.W. Liang, C.W. Tu and E.R. Weber, J. Electron. Mater. 22, 1487 (1993).
B.W. Liang, P.Z. Lee, D.W. Shih and C.W. Tu, Appl. Phys. Lett. 60, 2104 (1992).
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Fang, Z.Q., Look, D.C., Uchida, M. et al. Deep centers in undoped semi-insulating InP. J. Electron. Mater. 27, L68–L71 (1998). https://doi.org/10.1007/s11664-998-0152-x
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DOI: https://doi.org/10.1007/s11664-998-0152-x