Skip to main content
Log in

Investigation of the effects of polishing and etching on the quality of Cd1−xZnxTe using spatial mapping techniques

  • Published:
Journal of Electronic Materials Aims and scope Submit manuscript

Abstract

We examined the effects of polishing and etching on the structural and electrical properties of various high pressure Bridgman Cd1−xZnxTe (CZT) crystals using high resolution x-ray diffraction (HRXRD) and alpha particle mapping. Two etching solutions investigated are: (1) standard bromine-methanol solution, and (2) standard solution mixed with lactic acid. HRXRD, and in particular, triple axis x-ray diffraction (TAXRD) showed the effectiveness of the bromine-methanol etch in removing residual strain and damage from the CZT crystal. TAXRD mapping of a ∼5 cm2 CZT crystal after etching resulted in a reduction of the average rocking curve full width at half maximum to 15 arc-sec (compared to 23 arc-sec for the “as-received”). Alpha particle mapping of the electron risetime and the pulse height spectrum, along with leakage current measurements, showed varying effects of the different etching solutions on the surface properties (and hence their influence on the electrical and detector properties). These preliminary results show the importance and the sensitivity of the overall detector properties on the surface preparation conditions of CZT crystals used as radiation detectors.

This is a preview of subscription content, log in via an institution to check access.

Access this article

Price excludes VAT (USA)
Tax calculation will be finalised during checkout.

Instant access to the full article PDF.

Similar content being viewed by others

References

  1. F.P. Doty, J.F. Butler, J.F. Schetzina and K.A. Bowers, J. Vac. Sci. Technol. B 10, 1418 (1992).

    Article  CAS  Google Scholar 

  2. J.F. Butler, CL. Lingren and F.P. Doty, IEEE Trans. Nucl. Sci. 39, 605 (1992).

    Article  CAS  Google Scholar 

  3. Semiconductors for Room-Temperature Radiation Detector Applications, eds. R.B. James, T.E. Schlesinger, P. Siffert and L. Franks, 302 (Pittsburgh, PA: Mater. Res. Soc, 1993).

    Google Scholar 

  4. Semiconductors for Room Temperature Nuclear Detector Applications, eds. T.E. Schlesinger and R.B. James, (San Diego: Academic Press, 1995), p. 43.

    Google Scholar 

  5. V.S. Wang and R.J. Matyi, J. Appl. Phys. 72, 5158 (1992).

    Article  CAS  Google Scholar 

  6. L. Hart, D.K. Bowen and G.R. Fisher, Adv. X-ray Analysis 33, 55 (1990).

    CAS  Google Scholar 

  7. C.J. Johnson, E.E. Eissler, S.E. Cameron, Y. Kong, S. Fan, S. Jovanovic and K.G. Lynn, Semiconductors for Room-Temperature Radiation Detector Applications, eds. R.B. James, T.E. Schlesinger, P. Siffert and L. Franks, 302 (Pittsburgh, PA: Mater. Res. Soc, 1993), p. 463.

    Google Scholar 

  8. H. Chen, J. Tong, Z. Hu, D.T. Shi, G.H. Wu, K.-T. Chen, M.A. George, W.E. Collins, A. Burger, R.B. James, C.M. Stahle and L.M. Barlett, J. Appl. Phys. 80, 3509 (1996).

    Article  CAS  Google Scholar 

  9. H. Chen, S.U. Egarievwe, Z. Hu, J. Tong, D.T. Shi, G.H. Wu, K.-T. Chen, M.A. George, W.E. Collins, A. Burger, R.B. James, CM. Stahle and L.M. Bartlett, Hard X-ray/Gamma Ray and Neutron Optics, Sensors, and Applications, eds. R.B. Hoover and F.P. Doty, 2859 (SPIE, 1996).

  10. J.M. Van Scyoc, J.C. Lund, D.H. Morse, A.J. Antolak, R.W. Olsen, R.B. James, M. Schieber, H. Yoon, M.S. Goorsky, J. Toney and T.E. Schlesinger, J. Electron. Mater. 25, 1323 (1996).

    Article  Google Scholar 

  11. J. M. Van Scyoc, H. Yoon, M. S. Goorsky, J. C. Lund, R. B. James and F. P. Doty, presented at the 1996 IEEE Nuclear Science Symp., Anaheim, CA.

  12. H. Chen, S.U. Egarievwe, Z. Hu, J. Tong, D.T. Shi, G.H. Wu, K.-T. Chen, M.A. George, W.E. Collins, A. Burger, R.B. James, C.M.Stahle, and L.M. Bartlett, Hard X-ray/Gamma Ray and Neutron Optics, Sensors, and Applications, eds. R.B. Hoover and F.P. Doty, 2859 (SPIE,1996).

  13. A. Musa and J.P. Ponpon, Nucl. Instr. Meth. 216, 259 (1983).

    Article  CAS  Google Scholar 

  14. M.S. Goorsky, H. Yoon, M. Schieber, R.B. James, D.S. McGregor and M. Natarajan, presented at the 9th Intl. Workshop on Room-Temperature Semiconductor X-and y-ray Detectors, Associated Electronics, and Applications, September 1995, Grenoble, France, to appear in Nucl. Instr. and Meth. A.

  15. H. Yoon, S.E. Lindo and M.S. Goorsky, presented at the ACCG-10/ICVGE-9 Conference, Vail, CO, August 1996 and accepted for publication in the J. Cryst. Growth.

  16. H. Yoon, J.M. Van Scyoc, M.S. Goorsky, J.C. Lund, M. Schieber, R.B. James and F.P. Doty, presented at the Electronic Materials Conf., Santa Barbara, CA, June 26-28, 1996.

  17. J.F. Butler, F.P. Doty, B. Apotovsky, J. Lajzerowicz and L. Verger, Mater. Sci. and Eng. B 16, 291 (1993).

    Article  Google Scholar 

Download references

Author information

Authors and Affiliations

Authors

Rights and permissions

Reprints and permissions

About this article

Cite this article

Yoon, H., Van Scyoc, J.M., Goorsky, M.S. et al. Investigation of the effects of polishing and etching on the quality of Cd1−xZnxTe using spatial mapping techniques. J. Electron. Mater. 26, 529–533 (1997). https://doi.org/10.1007/s11664-997-0189-2

Download citation

  • Received:

  • Accepted:

  • Issue Date:

  • DOI: https://doi.org/10.1007/s11664-997-0189-2

Key words

Navigation