Abstract
Reflectance anisotropy spectroscopy (RAS) has been used to study the metalorganic vapor phase epitaxy growth process for GaxIn1−xAsyP1−y/InP light emitting diodes. The sensitivity of RAS to morphology changes is demonstrated by InP growth on different InP:Fe substrates. RAS reveals not only development of dull surfaces but also detects initial temporary roughness of mirror-like layers. Based on the RAS results the substrate preparation was optimized. RAS spectra measured on n- and p-type InP and p-type GaInAsP during light emitting diodes production are suitable for finger-printing of the growth process. Spectra from InP:Si and InP:Zn layers show characteristic features near 4.3 eV which allow for assessment of doping level at growth temperature (640°C). Correlation of RAS spectra and transients during growth with the quaternary composition was achieved. A change in composition of only Δx=0.01, Δy=0.03 corresponding to a shift of photoluminescence-peak position by 16 nm was detectable in RAS spectra. The results demonstrate the high sensitivity and thus the suitability of RAS for on-line control during growth of device structures.
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Kurpas, P., Sato, M., Knauer, A. et al. On-line growth monitoring of InP-based device structures by reflectance anisotropy spectroscopy. J. Electron. Mater. 26, 1154–1158 (1997). https://doi.org/10.1007/s11664-997-0012-0
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DOI: https://doi.org/10.1007/s11664-997-0012-0