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Low-Temperature Growth of ZnMgO Thin Films by Atmospheric Spin-Coating Using Diethylzinc Solution

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Non-doped ZnMgO thin film deposited at room temperature on a white glass using a diethylzinc-based solution grown by atmospheric conventional spin coating was annealed at 150°C. The sample had an average optical transmittance of more than 85% in the visible region, and a-axis orientation hexagonal polycrystal, a dense crystal, and a flat surface. Moreover, the n-type sample was obtained from the predominant zinc interstitial caused by x-ray photoemission spectroscopy. A sample had a resistivity of 14 × 106 Ω cm, carrier concentration of 3.9 × 1011 cm−3, and mobility of 5.0 cm2 (Vs)−1.

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Correspondence to Kenji Yoshino or Tomohiro Higashi.

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Yoshino, K., Tominaga, H., Komaki, Y. et al. Low-Temperature Growth of ZnMgO Thin Films by Atmospheric Spin-Coating Using Diethylzinc Solution. J. Electron. Mater. 52, 5134–5139 (2023).

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