Abstract
In this paper, a novel biomolecule nanocavity immobilization in a dielectric modulated triple-hybrid metal gate-all-around (THM-GAA) junctionless (JL) NWFET has been proposed to improve sensitivity for detecting various diseases. A comparative analysis of the dielectric modulated triple-hybrid metal gate-all-around JL-NWFET biosensor has been carried out with unique and double-hybrid metal gate (DHM) transistors immobilizing different biomolecules (neutral) such as streptavidin, \({\text{ChO}}_{X}\), APTES, uricase, and biotin in the nanogap cavity region. The simulation results were analyzed using the Atlas-3D device simulation tool. The work shows that higher work-function and higher dielectric materials near the drain suppress/overcome short-channel effects and quantum mechanical tunneling caused by hot-carrier and electron scattering due to a high electric field and saturation velocity. The impact of neutral biomolecules on device output characteristics such as switching (\(I_{{{\text{ON}}}} /I_{{{\text{OFF}}}}\)) ratio, shifting threshold voltage (\(\Delta V_{{{\text{th}}}}\)), intrinsic voltage gain \(\left( {g_{m} /g_{d} } \right)\), drain off-current sensitivity \(\left( {S_{{I_{{{\text{OFF}}}} }} } \right)\), subthreshold slope, transconductance \(\left( {g_{m} } \right)\), output conductance \(\left( {g_{d} } \right)\), surface potential and output resistance \(\left( {1/g_{d} } \right)\) has been studied. Sensitivity of the proposed device for detecting a specific neutral biomolecule was examined using a drain off-current ratio, and the results were compared with available works. The result shows a higher sensitivity in a triple-hybrid metal gate transistor than a unique and double-hybrid metal gate transistor in addition to available works, as we have discussed under the results and discussion section. For example, drain off-current sensitivity (\(S_{{I_{{{\text{OFF}}}} }}\)) in a triple-hybrid metal gate when a biotin biomolecule is immobilized uniformly in the nanogap cavity was 217.6% and 46.43% higher than a unique and double-hybrid metal gate transistor, respectively. We found that the proposed device can detect a specific biomolecule to diagnose different biomarkers for diseases such as breast and lung cancer.
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The study was funded by Ethiopia's Ministry of Higher Education and India's Delhi Technological University.
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Getnet, M., Chaujar, R. Sensitivity Analysis of Biomolecule Nanocavity Immobilization in a Dielectric Modulated Triple-Hybrid Metal Gate-All-Around Junctionless NWFET Biosensor for Detecting Various Diseases. J. Electron. Mater. 51, 2236–2247 (2022). https://doi.org/10.1007/s11664-022-09466-1
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DOI: https://doi.org/10.1007/s11664-022-09466-1