Abstract
The modulation transfer function (MTF) is one of the key figures of merit for the characterization of infrared focal plane arrays (FPA). Moreover, with both the trend of reduced pixel pitch and the variety of pixel structures observed in the industry, the study of the impact of wavelength on the MTF is also of great interest, and thus needs a spectro-spatial measurement. In this paper, we demonstrate such spectral MTF measurements in the mid-wavelength infrared (MWIR) band by the use of several spectral bandpass filters. We realize those measurements at 80 K on a specific n/p 320 × 256 HgCdTe MWIR FPA, divided into different areas. The pixel pitch is the same for all areas (30 μm), the only difference being the fill factor, which differs from one zone to another. The MTF measurement bench is based on a continuously self-imaging grating interferometer integrated in a specific cryogenic set-up.
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Acknowledgments
This project was sponsored by the DGA, the French procurement agency, and the LabEx FOCUS (ANR-11-LABX-0013).
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Huard, E., Derelle, S., Jaeck, J. et al. Development of a Cryogenic Test Bench for Spectral MTF Measurement on Midwave Infrared Focal Plane Arrays. J. Electron. Mater. 49, 6957–6962 (2020). https://doi.org/10.1007/s11664-020-08388-0
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DOI: https://doi.org/10.1007/s11664-020-08388-0