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Development of an Impedance-Based Electrical Humidity Sensor Using Sb-Doped Ge-Se-Te Chalcogenide Glasses

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Abstract

The present paper demonstrates the effect of humidity on the (Ge11.5Te12.5Se67.5)80Sb20 and (Ge11.5 Te12.5Se67.5)70Sb30 thin film deposited on a glass substrate. The films prepared using a thermal evaporation technique reveal an amorphous nature as observed from the x-ray diffraction (XRD) graph. The light absorption taking place in the UV-visible region was confirmed using a UV–Vis spectrophotometer, and optical bandgap values of 1.46 eV and 1.42 eV were found for (Ge11.5Te12.5Se67.5)80Sb20 and (Ge11.5 Te12.5Se67.5)70Sb30 alloys using Tauc’s plot. The films were investigated for an impedance-based electrical humidity sensor. The maximum sensitivity of the chalcogenide sensing element was 13.86 MΩ/%RH and 15.31 MΩ/%RH for (Ge11.5Te12.5Se67.5)80Sb20 and (Ge11.5 Te12.5Se67.5)70Sb30, respectively, in the range 10–25%RH at room temperature, and the average sensitivity for the entire range of %RH was 7.33 MΩ/%RH and 9.42 MΩ/%RH, respectively, for the two glasses. The aging effect for samples was found to be negligible; hence they are stable against time, which makes them suitable for use as humidity sensors. The repeatability of the sensors was 89% and 94.45%, respectively.

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Authors and Affiliations

  1. Amorphous Semiconductor Research Lab, Department of Physics and Material Science, Madan Mohan Malaviya University of Technology, Gorakhpur, 273010, India

    Surabhi Mishra & D. K. Dwivedi

  2. Department of Electronics and Communication Engineering, Madan Mohan Malaviya University of Technology, Gorakhpur, 273010, India

    Pooja Lohia

  3. Nanomaterials and Sensors Research Laboratory, Department of Physics, Babasaheb Bhimrao Ambedkar University, Lucknow, U.P., 226025, India

    Priyanka Chaudhary & B. C. Yadav

Authors
  1. Surabhi Mishra
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  2. Pooja Lohia
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  3. Priyanka Chaudhary
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  4. B. C. Yadav
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  5. D. K. Dwivedi
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Correspondence to D. K. Dwivedi.

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Mishra, S., Lohia, P., Chaudhary, P. et al. Development of an Impedance-Based Electrical Humidity Sensor Using Sb-Doped Ge-Se-Te Chalcogenide Glasses. J. Electron. Mater. 49, 6492–6500 (2020). https://doi.org/10.1007/s11664-020-08362-w

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  • DOI: https://doi.org/10.1007/s11664-020-08362-w

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