High Rate Growth of MOCVD-Derived GdYBCO Films Based on a Simple Self-Heating Method
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The home-designed metal organic chemical vapor deposition (MOCVD) system was applied to prepare the Gd0.5Y0.5Ba2Cu3O7-δ (GdYBCO) films at a high deposition rate in order to improve the production efficiency and reduce the preparation cost of high temperature superconducting tapes. Based on a simple self-heating method, the distance between the shower head and the substrate surface can be reduced effectively to increase the concentration of metal organic sources on the substrate surface, which can commendably improve the deposition rate of GdYBCO films and the utilization ratio of metal organic sources. At last, the GdYBCO films were successfully prepared on the LaMnO3 template at the high deposition rate of 1 μm/min by the MOCVD process based on the simple self-heating method and the critical current (Ic) was more than 220 A/cm-width (77 K, 0 T), corresponding to the critical current density (Jc) more than 4.4 MA/cm2 (77 K, 0 T).
KeywordsHigh deposition rate GdYBCO MOCVD self-heating critical current density
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This work is supported by the National High-tech R&D Program (No. 2014AA032702). Meanwhile, we also acknowledge the support of the National Natural Science Foundation of China (No. 51702265).
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