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High Rate Growth of MOCVD-Derived GdYBCO Films Based on a Simple Self-Heating Method

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Abstract

The home-designed metal organic chemical vapor deposition (MOCVD) system was applied to prepare the Gd0.5Y0.5Ba2Cu3O7-δ (GdYBCO) films at a high deposition rate in order to improve the production efficiency and reduce the preparation cost of high temperature superconducting tapes. Based on a simple self-heating method, the distance between the shower head and the substrate surface can be reduced effectively to increase the concentration of metal organic sources on the substrate surface, which can commendably improve the deposition rate of GdYBCO films and the utilization ratio of metal organic sources. At last, the GdYBCO films were successfully prepared on the LaMnO3 template at the high deposition rate of 1 μm/min by the MOCVD process based on the simple self-heating method and the critical current (Ic) was more than 220 A/cm-width (77 K, 0 T), corresponding to the critical current density (Jc) more than 4.4 MA/cm2 (77 K, 0 T).

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Acknowledgements

This work is supported by the National High-tech R&D Program (No. 2014AA032702). Meanwhile, we also acknowledge the support of the National Natural Science Foundation of China (No. 51702265).

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Authors and Affiliations

  1. State Key Lab of Electronic Thin Films and Integrated Devices, University of Electronic Science and Technology of China, Chengdu, 610054, People’s Republic of China

    Ruipeng Zhao, Qing Liu, Hao Tang, Bowan Tao & Yanrong Li

  2. Chengdu Fine Optical Engineering Research Center, Chengdu, 610041, People’s Republic of China

    Fei Zhang

  3. School of Physical Science and Technology, Southwest Jiaotong University, Chengdu, 610031, People’s Republic of China

    Yudong Xia

  4. School of Physics, Shanghai University, Shanghai, 200444, People’s Republic of China

    Yuming Lu & Chuanbing Cai

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  1. Ruipeng Zhao
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  2. Qing Liu
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  5. Hao Tang
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Correspondence to Bowan Tao.

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Zhao, R., Liu, Q., Zhang, F. et al. High Rate Growth of MOCVD-Derived GdYBCO Films Based on a Simple Self-Heating Method. J. Electron. Mater. 47, 7062–7068 (2018). https://doi.org/10.1007/s11664-018-6632-8

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  • DOI: https://doi.org/10.1007/s11664-018-6632-8

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