Characterization of the Failure Site Distribution in MIM Devices Using Zoomed Wavelet Analysis
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The angular wavelet analysis is applied to the study of the spatial distribution of breakdown (BD) spots in Pt/HfO2/Pt capacitors with square and circular areas. The method is originally developed for rectangular areas, so a zoomed approach needs to be considered when the observation window does not coincide with the device area. The BD spots appear as a consequence of the application of electrical stress to the device. The stress generates defects within the dielectric film, a process that ends with the formation of a percolation path between the electrodes and the melting of the top metal layer because of the high release of energy. The BD spots have lateral sizes ranging from 1 μm to 3 μm and they appear as a point pattern that can be studied using spatial statistics methods. In this paper, we report the application of the angular wavelet method as a complementary tool for the analysis of the distribution of failure sites in large-area metal–insulator–metal (MIM) devices. The differences between considering a continuous or a discrete wavelet and the role played by the number of BD spots are also investigated.
KeywordsOxide breakdown high-k spatial statistics wavelet analysis
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- 1.A. Oates, in IEDM Tech. Dig. 923 (2003).Google Scholar
- 7.J. Illian, A. Penttinen, H. Stoyan, and D. Stoyan, Statistical Analysis and Modelling of Spatial Point Patterns (Chichester: Wiley, 2008).Google Scholar
- 11.C.K. Chui, Wavelet Analysis and Its Applications, Vol. 1 (San Diego: Academic Press, 1992).Google Scholar