Acoustic Phonons and Mechanical Properties of Ultra-Thin Porous Low-k Films: A Surface Brillouin Scattering Study

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Abstract

To reduce the RC (resistance–capacitance) time delay of interconnects, a key development of the past 20 years has been the introduction of porous low-k dielectrics to replace the traditional use of SiO2. Moreover, in keeping pace with concomitant reduction in technology nodes, these low-k materials have reached thicknesses below 100 nm wherein the porosity becomes a significant fraction of the film volume. The large degree of porosity not only reduces mechanical strength of the dielectric layer but also renders a need for non-destructive approaches to measure the mechanical properties of such ultra-thin films within device configurations. In this study, surface Brillouin scattering (SBS) is utilized to determine the elastic constants, Poisson’s ratio, and Young’s modulus of these porous low-k SiOC:H films (∼ 25–250 nm thick) grown on Si substrates by probing surface acoustic phonons and their dispersions.

Keywords

Brilllouin light scattering low-k dielectrics ultra-thin films acoustic phonons 

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Copyright information

© The Minerals, Metals & Materials Society 2018

Authors and Affiliations

  1. 1.Department of PhysicsThe Ohio State UniversityColumbusUSA
  2. 2.Intel Corporation, Logic Technology DevelopmentHillsboroUSA
  3. 3.School of PhysicsUniversity of WitwatersrandJohannesburgSouth Africa

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