Journal of Electronic Materials

, Volume 47, Issue 2, pp 1601–1610 | Cite as

Production and Characterization of (004) Oriented Single Anatase TiO2 Films

  • Ferhunde AtayEmail author
  • Idris Akyuz
  • Muge Soyleyici Cergel
  • Banu Erdogan


Highly (004) oriented anatase TiO2 films have been successfully obtained by an inexpensive ultrasonic spray pyrolysis technique at low substrate temperatures and without additional annealing. X-ray diffraction analysis, ultraviolet–visible spectroscopy and field emission scanning electron microscopy were used to analyze the structural, optical and surface properties of the films. By using the less reported TiCl4 solution, the optical band gap values falling into the visible region (between 2.70 eV and 2.92 eV) have been obtained for all films. Spectroscopic ellipsometry technique has been used to determine the dispersive refractive index and extinction coefficient of TiO2 films. Possible electrical conduction mechanisms in TiO2 films have been examined using temperature dependent conductivity measurements in the temperature range of 78–300 K. At room temperature, electrical resistivity values of TiO2 films change between 1.68 × 104 Ω cm and 5.88 × 104 Ω cm. Considering the analyzed parameters with respect to substrate temperature, this work refers to the properties of anatase TiO2 films that are strongly correlated to the growth direction, namely (004). As a result, (004) oriented anatase TiO2 films with appropriate optical band gap values are promising materials for technological applications, especially for photocatalysts.


(004) Oriented TiO2 ultrasonic spray pyrolysis XRD spectroscopic ellipsometry FESEM temperature dependent conductivity 


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Authors are thankful to Eskisehir Osmangazi University Scientific Research Projects Commission for providing financial support under the Project No. of 2012-19005.


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Copyright information

© The Minerals, Metals & Materials Society 2017

Authors and Affiliations

  • Ferhunde Atay
    • 1
    Email author
  • Idris Akyuz
    • 1
  • Muge Soyleyici Cergel
    • 2
  • Banu Erdogan
    • 1
  1. 1.Department of PhysicsEskisehir Osmangazi UniversityEskisehirTurkey
  2. 2.Program of Medical Imaging TechnologiesOkan UniversityIstanbulTurkey

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