Free-Standing β-Ga2O3 Thin Diaphragms


Free-standing, very thin, single-crystal β-gallium oxide (β-Ga2O3) diaphragms have been constructed and their dynamical mechanical properties characterized by noncontact, noninvasive optical measurements harnessing the multimode nanomechanical resonances of these suspended nanostructures. We synthesized single-crystal β-Ga2O3 using low-pressure chemical vapor deposition (LPCVD) on a 3C-SiC epilayer grown on Si substrate at temperature of 950°C for 1.5 h. The synthesized single-crystal nanoflakes had widths of ∼ 2 μm to 30 μm and thicknesses of ∼ 20 nm to 140 nm, from which we fabricated free-standing circular drumhead β-Ga2O3 diaphragms with thicknesses of ∼ 23 nm to 73 nm and diameters of ∼ 3.2 μm and ∼ 5.2 μm using a dry stamp-transfer technique. Based on measurements of multiple flexural-mode mechanical resonances using ultrasensitive laser interferometric detection and performing thermal annealing at 250°C for 1.5 h, we quantified the effects of annealing and adsorption of atmospheric gas molecules on the resonant characteristics of the diaphragms. Furthermore, we studied the effects of structural nonidealities on these free-standing β-Ga2O3 nanoscale diaphragms. We present extensive characterization of the mechanical and optical properties of free-standing β-Ga2O3 diaphragms, paving the way for realization of resonant transducers using such nanomechanical structures for use in applications including gas sensing and ultraviolet radiation detection.

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Correspondence to Philip X.-L. Feng.

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Zheng, XQ., Lee, J., Rafique, S. et al. Free-Standing β-Ga2O3 Thin Diaphragms. Journal of Elec Materi 47, 973–981 (2018).

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  • β-Gallium oxide (β-Ga2O3)
  • suspended nanostructure
  • nanomechanics
  • resonance
  • nanoelectromechanical systems (NEMS)
  • thermal annealing