Abstract
Fourier transform infrared (FTIR) measurements were carried out on thin films and bulk single crystals of ZnO over a wide temperature range to study the free-carrier and multi-phonon infrared absorptions and the effects of hydrogen incorporation on these properties. Aluminum-doped ZnO thin films were deposited on quartz substrates using atomic-layer deposition (ALD) and sol–gel methods. Hall-effect measurements showed that the ALD films have a resistivity of ρ = 1.11 × 10−3 Ω cm, three orders of magnitude lower than sol–gel films (ρ = 1.25 Ω cm). This result is consistent with the significant difference in their free-carrier absorption as revealed by FTIR spectra obtained at room temperature. By reducing the temperature to 80 K, the free carriers were frozen out, and their absorption spectrum was suppressed. From the FTIR measurements on ZnO single crystals that were grown by the chemical vapor transport method, we identified a shoulder around 3350 cm−1 and associated it with the presence of two or more hydrogen ions in a Zn vacancy. After reducing the hydrogen level in the crystal, the measurements revealed the multi-phonon absorption of ZnO in the range of 700–1200 cm−1. This study shows that the multi-phonon absorption bands can be completely masked by the presence of a large concentration of hydrogen in the crystals.
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Acknowledgements
The author would like to thank Wallace Rice for his help with FTIR setup. This work was funded by Air Force office of Scientific Research, Summer Faculty Fellowship Program (AFOSR-SFFP-2015). Research at the Oak Ridge National Laboratory for one author (LAB) was sponsored by the U.S. Department of Energy, Basic Energy Sciences, Materials Sciences and Engineering Division.
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Saadatkia, P., Ariyawansa, G., Leedy, K.D. et al. Fourier Transform Infrared Spectroscopy Measurements of Multi-phonon and Free-Carrier Absorption in ZnO. J. Electron. Mater. 45, 6329–6336 (2016). https://doi.org/10.1007/s11664-016-5023-2
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DOI: https://doi.org/10.1007/s11664-016-5023-2