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Journal of Electronic Materials

, Volume 45, Issue 1, pp 329–338 | Cite as

Thermal Aspects of Pyroelectric Ceramic Functional Material for Infrared Image Sensing

  • M.A. MatinEmail author
  • T. Sugai
  • N. Kawazu
  • D. Akai
  • K. Sawada
  • M. Ishida
Article
  • 281 Downloads

Abstract

In this paper, we present the design, fabrication and thermal simulation of smart 1024-element (32 × 32 pixels), monolithic, pyroelectric, functional electro-ceramic material-based infrared (IR) image sensors. A sol–gel-deposited PbZr0.4Ti0.6O3 (PZT) thin film was used as a pyroelectric material for the detector. We tailored the geometries and dimensions of the devices in designing the the image sensors with a smart material. The influence of a thermal isolator has been shown to significantly reduce heat loss to the device structure and environment. Introducing circular pixels instead of square ones has confirmed the ability to obtain an optimal design with a functional material for use in a smart image sensor, resulting in a maximal temperature change of 4 mK at a response frequency of 10 Hz.

Keywords

Functional electro-ceramic material pyroelectric monolithic epitaxial thermal modeling micromachining thin film 

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Notes

Acknowledgements

This research was financially supported by the Global Center of Excellence (GCOE) Program, Frontiers of Intelligent Sensing of the Ministry of Education, Culture, Sports, Science and Education, Japan.

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Copyright information

© The Minerals, Metals & Materials Society 2015

Authors and Affiliations

  • M.A. Matin
    • 1
    Email author
  • T. Sugai
    • 2
  • N. Kawazu
    • 2
  • D. Akai
    • 2
  • K. Sawada
    • 2
    • 3
  • M. Ishida
    • 2
    • 3
  1. 1.Glass and Ceramic EngineeringBangladesh University of Eng. and TechDhakaBangladesh
  2. 2.Electrical and Electronic Information EngineeringToyohashi University of TechnologyToyohashiJapan
  3. 3.Electronics-Inspired Interdisciplinary Research Institute (EIIRIS)Toyohashi University of TechnologyToyohashiJapan

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