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Local Piezoelectric Properties and Polarity Distribution of ZnO Films Deposited at Different Substrate Temperatures

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Abstract

In this work we deposited c-axis-oriented ZnO films using radiofrequency magnetron sputtering at substrate temperatures from 200°C to 500°C. We then characterized their local piezoelectric properties and polarity distributions using piezoresponse force microscopy, revealing that these ZnO films contained grains with opposite polarities: O-face and Zn-face. The grains with O-face polarity exhibited larger piezoresponse magnitude than those with Zn-face polarity. As the substrate temperature was increased, the predominant polarization orientation of the films changed from O-face to Zn-face. The film deposited at 300°C showed uniform polarization orientation together with higher piezoresponse magnitude.

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References

  1. U. Ozgur, Y.I. Alivov, C. Liu, A. Teke, M.A. Reshchikov, S. Dogan, V. Avrutin, S.J. Cho, and H. Morkoc, J. Appl. Phys. 98, 041301 (2005).

    Article  Google Scholar 

  2. S.J. Pearton, D.P. Norton, K. Ip, Y.W. Heo, and T. Steiner, Prog. Mater. Sci. 50, 293 (2005).

    Article  Google Scholar 

  3. R. Serhane, S. Abdelli-Messaci, S. Lafane, H. Khales, W. Aouimeur, A. Hassein-Bey, and T. Boutkedjirt, Appl. Surf. Sci. 288, 572 (2014).

    Article  Google Scholar 

  4. Y.Q. Fu, Y. Li, C. Zhao, F. Placido, and A.J. Walton, Appl. Phys. Lett. 101, 194101 (2012).

    Article  Google Scholar 

  5. R. Ro, R. Lee, Z.-X. Lin, C.-C. Sung, Y.-F. Chiang, and S. Wu, Thin Solid Films 529, 470 (2013).

    Article  Google Scholar 

  6. T. Kamohara, M. Akiyama, and N. Kuwano, Appl. Phys. Lett. 92, 093506 (2008).

    Article  Google Scholar 

  7. T. Kamohara, M. Akiyama, N. Ueno, M. Sakamoto, K. Kano, A. Teshigahara, N. Kawahara, and N. Kuwano, Appl. Phys. Lett. 89, 243507 (2006).

    Article  Google Scholar 

  8. J.A. Christman, R.R. Woolcott, A.I. Kingon, and R.J. Nemanich, Appl. Phys. Lett. 73, 3851 (1998).

    Article  Google Scholar 

  9. Y.C. Yang, C. Song, X.H. Wang, F. Zeng, and F. Pan, Appl. Phys. Lett. 92, 012907 (2008).

    Article  Google Scholar 

  10. A. Gruverman and S.V. Kalinin, J. Mater. Sci. 41, 107 (2006).

    Article  Google Scholar 

  11. S.V. Kalinin, A. Rar, and S. Jesse, IEEE Trans. Ultrason. Ferroelectr. 53, 2226 (2006).

    Article  Google Scholar 

  12. D.A. Bonnell, S.V. Kalinin, A.L. Kholkin, and A. Gruverman, MRS Bull. 34, 648 (2009).

    Article  Google Scholar 

  13. T. Jungk, A. Hoffmann, and E. Soergel, Appl. Phys. Lett. 91, 253511 (2007).

    Article  Google Scholar 

  14. P. Bintachitt, S. Trolier-McKinstry, K. Seal, S. Jesse, and S.V. Kalinin, Appl. Phys. Lett. 94, 042906 (2009).

    Article  Google Scholar 

  15. V.V. Shvartsman and A.L. Kholkin, J. Appl. Phys. 108, 042007 (2010).

    Article  Google Scholar 

  16. C. Lichtensteiger, S. Fernandez-Pena, C. Weymann, P. Zubko, and J.-M. Triscone, Nano Lett. 14, 4205 (2014).

    Article  Google Scholar 

  17. I.K. Bdikin, J. Gracio, R. Ayouchi, R. Schwarz, and A.L. Kholkin, Nanotechnology 21, 235703 (2010).

    Article  Google Scholar 

  18. J. Kim, S. Hong, S. Buhlmann, Y. Kim, M. Park, Y.K. Kim, and K. No, J. Appl. Phys. 107, 104112 (2010).

    Article  Google Scholar 

  19. B.J. Rodriguez, A. Gruverman, A.I. Kingon, R.J. Nemanich, and O. Ambacher, Appl. Phys. Lett. 80, 4166 (2002).

    Article  Google Scholar 

  20. L.P. Schuler, N. Valanoor, P. Miller, I. Guy, R.J. Reeves, and M.M. Alkaisi, J. Electron. Mater. 36, 507 (2007).

    Article  Google Scholar 

  21. C.P. Li and B.H. Yang, J. Electron. Mater. 40, 253 (2011).

    Article  Google Scholar 

  22. T. Jungk, A. Hoffmann, and E. Soergel, Appl. Phys. Lett. 89, 163507 (2006).

    Article  Google Scholar 

  23. C.T. Yang, Z.Y. Zeng, Z. Chen, J.S. Liu, and S.R. Zhang, J. Cryst. Growth 293, 299 (2006).

    Article  Google Scholar 

  24. Q.Y. Xu, Y. Wang, X.L. Du, X.L. Du, Q.K. Xue, and Z. Zhang, Appl. Phys. Lett. 84, 2067 (2004).

    Article  Google Scholar 

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Acknowledgements

This work was supported by the National High Technology Research and Development Program (“863” Program) of China (No. 2013AA030801), the National Natural Science Foundation (Nos. 61306010 and 61106007), the Natural Science Foundation of Tianjin (No. 13JCZDJC36000), and Outstanding Young University Teacher Foundation of Tianjin.

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Authors and Affiliations

  1. Tianjin Key Laboratory of Film Electronic and Communicate Devices, School of Electronics Information Engineering, Tianjin University of Technology, Tianjin, 300384, China

    Cuiping Li, Wei Dai, Sheng Xu, Xiaowei Li, Ximing Chen & Baohe Yang

  2. College of Precision Instrument and Opto-electronics Engineering, Tianjin University, Tianjin, 300072, China

    Wei Dai, Sheng Xu & Baohe Yang

  3. Chinese Peoples Armed Police Forces Academy, Langfang, 065000, China

    Chengyao Gao

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  1. Cuiping Li
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  2. Wei Dai
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  3. Sheng Xu
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  4. Xiaowei Li
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  5. Chengyao Gao
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  6. Ximing Chen
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  7. Baohe Yang
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Correspondence to Baohe Yang.

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Li, C., Dai, W., Xu, S. et al. Local Piezoelectric Properties and Polarity Distribution of ZnO Films Deposited at Different Substrate Temperatures. J. Electron. Mater. 44, 1095–1099 (2015). https://doi.org/10.1007/s11664-015-3659-y

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  • DOI: https://doi.org/10.1007/s11664-015-3659-y

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