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Effect of an Al2O3/TiO2 Passivation Layer on the Performance of Amorphous Zinc–Tin Oxide Thin-Film Transistors

Journal of Electronic Materials volume 44, pages 651–657 (2015)Cite this article

The effect of an Al2O3/TiO2 stacked passivation layer on the performance of amorphous ZnSnO (a-ZTO) thin-film transistors (TFTs) was investigated by comparing field-effect mobility (μ FE) and subthreshold swing after passivation layer deposition. The values observed were 4.7 cm2/Vs and 0.64 V/decade, respectively, for uncoated TFTs and 4.6 cm2/Vs and 0.62 V/decade for passivated TFTs. In addition, excellent water vapor transmission was observed for electron beam-irradiated Al2O3/TiO2-passivated poly(ether sulfone) substrates in a humidity test, because the Al2O3/TiO2 passivation layer can enhance the interface properties between Al2O3 and TiO2. To investigate the origin of this enhancement, we performed x-ray photoelectron spectroscopy of both unpassivated and Al2O3/TiO2-passivated TFTs with a-ZTO back-channel layers after Ar annealing.

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Acknowledgements

This research was supported by the Basic Science Research Program through the National Research Foundation of Korea (NRF) funded by the Ministry of Education (NRF-2012M2B2A4029342).

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Authors and Affiliations

  1. Department of Nanoscale Semiconductor Engineering, Hanyang University, 17 Haengdang-dong, Seoungdong-Ku, Seoul, 133-791, Korea

    Dong-Suk Han, Jae-Hyung Park & Min-Soo Kang

  2. Department of Materials Science and Engineering, Hanyang University, 17 Haengdang-dong, Seoungdong-Ku, Seoul, 133-791, Korea

    So-Ra Shin, Yeon-Jae Jung, Duck-Kyun Choi & Jong-Wan Park

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  1. Dong-Suk Han
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Han, DS., Park, JH., Kang, MS. et al. Effect of an Al2O3/TiO2 Passivation Layer on the Performance of Amorphous Zinc–Tin Oxide Thin-Film Transistors. J. Electron. Mater. 44, 651–657 (2015). https://doi.org/10.1007/s11664-014-3554-y

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  • DOI: https://doi.org/10.1007/s11664-014-3554-y

Keywords

  • Amorphous oxide semiconductor
  • zinc-tin-oxide (ZTO)
  • Al2O3/TiO2
  • passivation layer
  • electron beam irradiation