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The Surface Kinetics of MBE-Grown CdTe (211)B During In Situ Cyclic Annealing

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Abstract

The surface kinetics of CdTe (211)B grown by molecular beam epitaxy (MBE) is investigated using spectroscopic ellipsometry (SE) during in situ cyclic annealing. A method of measuring sublimation rates from high-index surfaces without use of reflection high-energy electron diffraction is presented. The effect of Te2 overpressure on the activation energy of sublimation for the CdTe (211)B surface is reported. The sensitivity of SE to surface temperature and film thickness was leveraged to monitor sublimation rates of CdTe stabilized by a Te2 overpressure. The sublimation activation energy was found to increase from 0.45 eV to 2.94 eV under the Te2 beam pressure regime investigated.

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References

  1. R. Sporken, S. Sivananthan, K.K. Mahavadi, G. Monfroy, M. Boukerche, and J.P. Faurie, Appl. Phys. Lett. 55, 1879 (1989).

    Article  CAS  Google Scholar 

  2. S. Rujirawat, L.A. Almeida, Y.P. Chen, Sivananthan, and D.J. Smith, Appl. Phys. Lett. 77, 1810 (1997).

  3. T. Seldrum, R. Bommena, L. Samain, J. Dumont, S. Sivananthan, and R. Sporken, J. Vac. Sci. Technol. B 26, 1105 (2008).

    Article  CAS  Google Scholar 

  4. J.P. Faurie, S. Sivananthan, M. Boukerche, and J. Reno, Appl. Phys. Lett. 45, 1307 (1984).

    Article  CAS  Google Scholar 

  5. M.D. Lange, S. Sivananthan, X. Chu, and J.P. Faurie, Appl. Phys. Lett. 52, 978 (1988).

    Article  CAS  Google Scholar 

  6. J.M. Arias, R.E. DeWames, S.H. Shin, J.G. Pasko, J.S. Chen, and E.R. Gertner, Appl. Phys. Lett. 54, 1025 (1989).

    Article  CAS  Google Scholar 

  7. C.M. Lennon, L.A. Almeida, R.N. Jacobs, J.K. Marknas, P.J. Smith, J. Arias, A.E. Brown, and J. Pellegrino, J. Electron. Mater. 41, 2965 (2012).

    Article  CAS  Google Scholar 

  8. S.M. Johnson, D.R. Rhiger, J.P. Rosbeck, J.M. Peterson, S.M. Taylor, and M.E. Boyd, J. Vac. Sci. Technol. B 10, 1499 (1992).

    Article  CAS  Google Scholar 

  9. L.A. Almeida, L. Hirsch, M. Martinka, P.R. Boyd, and J.H. Dinan, J. Electron. Mater. 30, 608 (2001).

    Article  CAS  Google Scholar 

  10. R.N. Jacobs, L.A. Almeida, J. Markunas, J. Pellegrino, M. Groenert, M. Jaime-Vasquez, N. Mahadik, C. Andrews, S.B. Qadri, T. Lee, and M. Kim, J. Electron. Mater. 37, 1480 (2008).

    Article  CAS  Google Scholar 

  11. R.N. Jacobs, J. Markunas, J. Pellegrino, L.A. Almeida, M. Groenert, M. Jaime-Vasquez, N. Mahadik, C. Andrews, and S.B. Qadri, J. Cryst. Growth 310, 2960 (2008).

    Article  CAS  Google Scholar 

  12. Y. Chen, S. Farrell, G. Brill, P. Wijewarnasuriya, and N. Dhar, J. Cryst. Growth 310, 5303 (2008).

    Article  CAS  Google Scholar 

  13. M. Yamaguchi, J. Mater. Res. 6, 376 (1991).

    Article  CAS  Google Scholar 

  14. H.G. Tompkins and E.A. Irene, eds., Handbook of Ellipsometry (Norwich, NY: William Andrew, 2005).

    Google Scholar 

  15. J.D. Benson, B.K. Wagner, A. Torabi, and C.J. Summers, Appl. Phys. Lett. 49, 1034 (1986).

    Article  CAS  Google Scholar 

  16. S. Tatarenko, B. Daudin, and D. Brun, J. Appl. Phys. 65, 734 (1994).

    CAS  Google Scholar 

  17. J.M. Arias, G. Sullivan, and J. Vat, Sci. Technol. A 5, 3143 (1987).

    CAS  Google Scholar 

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Authors and Affiliations

  1. Corbin Company, Alexandria, VA, 22314, USA

    C. M. Lennon

  2. U.S. Army RDECOM, CERDEC, Night Vision and Electronic Sensors Directorate, Fort Belvoir, VA, 22060, USA

    L. A. Almeida, R. N. Jacobs, J. D. Benson, P. J. Smith, J. K. Markunas, J. Arias & J. Pellegrino

  3. RAND Corporation, Santa Monica, CA, 90401, USA

    J. Arias

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  1. C. M. Lennon
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  2. L. A. Almeida
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  3. R. N. Jacobs
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  4. J. D. Benson
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  5. P. J. Smith
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  6. J. K. Markunas
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  7. J. Arias
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  8. J. Pellegrino
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Correspondence to C. M. Lennon.

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Lennon, C.M., Almeida, L.A., Jacobs, R.N. et al. The Surface Kinetics of MBE-Grown CdTe (211)B During In Situ Cyclic Annealing. J. Electron. Mater. 42, 3344–3348 (2013). https://doi.org/10.1007/s11664-013-2767-9

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  • DOI: https://doi.org/10.1007/s11664-013-2767-9

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