Skip to main content

Interface Electron Traps as a Source of Anomalous Capacitance in AlGaN/GaN Heterostructures

Abstract

We studied by modeling and simulation how deep traps at the AlGaN/GaN heterostructure interface influence the shape of capacitance–voltage (CV) curves of the heterostructure. Assuming donor and acceptor type of traps, we found differences in the CV curves for sharp energy interface states or continuously distributed states with the same total concentration for the acceptor-type interface states. The background doping concentration of GaN had only a marginal influence on the shape of the CV curves. We observed that an anomalous capacitance peak occurred for the continuous distribution of traps in the bandgap; a similar peak had been observed in experiment. We also saw that the capacitance curves shifted slightly to the right or to the left depending on the GaN doping concentration. A remarkable difference was found between the capacitance curves for the structures with the sharp acceptor trap level and continuous distribution of traps. For donor-type interface states, we found practically no influence on CV curves since they remain populated and charge neutral during the measurement.

This is a preview of subscription content, access via your institution.

References

  1. A. Brannick, N.A. Zakhleniuk, B.K. Ridley, L.F. Eastman, J.R. Shealy, and W.J. Schaff, Microelectron. J. 40, 410 (2009).

    Article  CAS  Google Scholar 

  2. W. Ckickahoui, J.M. Blue, C. Bru-Chevalier, C. Dua, and R. Aubry, Phys. Stat. Sol. C 7, 92 (2010).

    Article  Google Scholar 

  3. Y.S. Park, M. Lee, K. Jeon, I.T. Yoon, Y. Shon, H. Im, C.J. Park, H.Y. Cho, and M.-S. Han, Appl. Phys. Lett. 97, 112110 (2010).

    Article  Google Scholar 

  4. Y. Nakano, Y. Irokawa, and M. Takeguchi, Appl. Phys. Express 1, 091101 (2008).

    Article  Google Scholar 

  5. Y. Huang, D.J. Chen, H. Lu, R. Zhang, Y.D. Zheng, L. Li, X. Dong, Z.H. Li, C. Chen, and T.S. Chen, IEEE Electron. Dev. Lett. 32, 1071 (2011).

    Article  Google Scholar 

  6. L. Semra, A. Telia, and A. Soltani, Surf. Interface Anal. 42, 799 (2010).

    Article  CAS  Google Scholar 

  7. L.E. Byrum, G. Ariyawansa, R.C. Jayasinghe, N. Dietz, A.G.U. Perera, S.G. Matsik, I.T. Ferguson, A. Bezinger, and H.C. Liu, J. Appl. Phys. 105, 023709 (2009).

    Article  Google Scholar 

  8. Z.-Q. Fang, B. Claffin, D.C. Look, D.S. Green, and R. Ventury, J. Appl. Phys. 108, 063706 (2010).

    Article  Google Scholar 

  9. I.D. Mayergoyz, J. Appl. Phys. 59, 195 (1986).

    Article  CAS  Google Scholar 

  10. C.E. Korman and I.D. Mayergoyz, J. Appl. Phys. 68, 1324 (1990).

    Article  Google Scholar 

  11. J. Osvald, J. Appl. Phys. 106, 013708 (2009).

    Article  Google Scholar 

  12. P. Kordoš, D. Gregušová, R. Stoklas, š. Gaži, and J. Novák, Solid State Electron. 52, 973 (2008).

    Article  Google Scholar 

  13. Y. Irokawa, N. Matsuki, M. Sumiya, Y. Sakuma, T. Sekiguchi, T. Chikyo, Y. Sumida, and Y. Nakano, Phys. Stat. Sol. C 7, 1928 (2010).

    Article  CAS  Google Scholar 

Download references

Author information

Authors and Affiliations

Authors

Corresponding author

Correspondence to J. Osvald.

Rights and permissions

Reprints and Permissions

About this article

Cite this article

Osvald, J. Interface Electron Traps as a Source of Anomalous Capacitance in AlGaN/GaN Heterostructures. J. Electron. Mater. 42, 1184–1189 (2013). https://doi.org/10.1007/s11664-013-2553-8

Download citation

  • Received:

  • Accepted:

  • Published:

  • Issue Date:

  • DOI: https://doi.org/10.1007/s11664-013-2553-8

Keywords

  • III–V heterostructures
  • heterostructure capacitance
  • interface traps
  • deep levels
  • semiconductor traps