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Low-Pressure Chemical Vapor Deposition of CdS and Atomic Layer Deposition of CdTe Films for HgCdTe Surface Passivation

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Abstract

HgCdTe narrow-bandgap materials are used in the fabrication of infrared detectors and focal-plane arrays. Many of these advanced devices require complex structures to be processed into them. Passivation of planar detectors is typically done with vacuum-evaporated CdTe or related II–VI materials. New advanced detector topology necessitates the use of low-pressure chemical vapor deposition (LPCVD) and atomic layer deposition (ALD) for improved conformal coverage. Preliminary studies on LPCVD of CdS and ALD of CdTe were carried out and characterized for conformal coverage. The effects of CdS and CdTe films on HgCdTe minority-carrier lifetime are also studied at 300 K and 77 K.

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References

  1. L.O. Bubulac, W.E. Tennant, J. Bajaj, J. Sheng, R. Brigham, A.H.B. Vanderwyck, M. Zandian, and W.V. Mc Levige, J. Electron. Mater. 24, 1175 (1995).

    Article  CAS  Google Scholar 

  2. M.B. Reine, K.R. Maschhoff, S.P. Tobin, P.W. Norton, J.A. Mroczkowski, and E.E. Krueger, Semicond. Sci. Technol. 8, 788 (1993).

    Article  CAS  Google Scholar 

  3. S. Yamaga, A. Yoshikawa, and H. Kasai, Jpn. J. Appl. Phys. 26, 1002 (1987).

    Article  CAS  Google Scholar 

  4. J. Ni and J.J. BelBruno, J. Cryst. Growth 182, 321 (1997).

    Article  CAS  Google Scholar 

  5. W.S. Wang, H.E. Ehsani, and I.B. Bhat, J. Cryst. Growth 124, 670 (1992).

    Article  CAS  Google Scholar 

  6. M. Godlewski, E. Guziewicz, G. Łuka, T. Krajewski, M. Łukasiewicz, Ł. Wachnicki, A. Wachnicka, K. Kopalko, A. Sarem, and B. Dalati, Thin Solid Films 518, 1145 (2009).

    Article  CAS  Google Scholar 

  7. N. LiCausi, J. Dingley, Y. Danon, J.-Q. Lu, and I.B. Bhat, Proc. SPIE 7079, 707908 (2008).

    Article  Google Scholar 

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Authors and Affiliations

  1. Department of Electrical, Computer and Systems Engineering, Rensselaer Polytechnic Institute, 110 8th Street, Troy, NY, 12180, USA

    Nicholas Licausi, Sunil Rao & Ishwara Bhat

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  1. Nicholas Licausi
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  2. Sunil Rao
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  3. Ishwara Bhat
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Correspondence to Nicholas Licausi.

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Licausi, N., Rao, S. & Bhat, I. Low-Pressure Chemical Vapor Deposition of CdS and Atomic Layer Deposition of CdTe Films for HgCdTe Surface Passivation. J. Electron. Mater. 40, 1668–1673 (2011). https://doi.org/10.1007/s11664-011-1640-y

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  • DOI: https://doi.org/10.1007/s11664-011-1640-y

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