Abstract
Stretchable electronics need stretchable wiring membranes that are equivalent to printed wiring boards but with elastically stretchable insulators and multilevel metallization. We have developed technology for elastically stretchable two-level metallization on an elastomeric membrane. Two levels of conductors were separated by a photopatternable elastomeric dielectric and connected through via holes. They were evaluated at uniaxial tensile strains of up to 30% and then used to create an elastomeric resistor–inductor–capacitor (RLC) circuit, whose alternating-current (AC) response was measured at biaxial tensile strains of up to 6%. We describe the fabrication process, morphology, and electrical performance of the bilevel metallization and the RLC circuit.
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Open Access This is an open access article distributed under the terms of the Creative Commons Attribution Noncommercial License ( https://creativecommons.org/licenses/by-nc/2.0 ), which permits any noncommercial use, distribution, and reproduction in any medium, provided the original author(s) and source are credited.
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Harris, J., Graudejus, O. & Wagner, S. Elastically Stretchable Insulation and Bilevel Metallization and Its Application in a Stretchable RLC Circuit. J. Electron. Mater. 40, 1335–1344 (2011). https://doi.org/10.1007/s11664-011-1613-1
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DOI: https://doi.org/10.1007/s11664-011-1613-1