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Exact Analytical Solution for the Critical Layer Thickness of a Lattice-Mismatched Heteroepitaxial Layer

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Based on the Lambert W-function, an exact analytical solution for the critical thickness of a lattice-mismatched heteroepitaxial layer is presented. The new expression in exact and algebraic closed form eliminates the need for complex iterative computation. Its high accuracy is proved by comparison of the calculated critical thickness versus fractional atomic content of an alloy epilayer with the respective numerical solution.

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Correspondence to C. Hadj Belgacem.

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Hadj Belgacem, C., Fnaiech, M. Exact Analytical Solution for the Critical Layer Thickness of a Lattice-Mismatched Heteroepitaxial Layer. J. Electron. Mater. 39, 2248–2250 (2010). https://doi.org/10.1007/s11664-010-1290-5

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  • DOI: https://doi.org/10.1007/s11664-010-1290-5

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