Highly conductive and transparent zinc oxide thin films were prepared on cleaned Corning Eagle2000 glass substrates by chemical bath deposition (CBD) using Zn(NO3)2 and (CH3)2NHBH3; the effects of annealing on the structural, electrical and optical properties were investigated. The electrical properties of the film were greatly affected by annealing. Structural characterization was performed by x-ray diffraction and field emission scanning electron micro- scopy. The thin film had a low resistivity of 2.9 × 10−2 Ω cm, an average transmittance of 81.2%, and a bandgap of 3.23 eV (which is in the visible range) when the film was annealed at 600°C in Ar + H2. The results demonstrated that a low-resistivity and high-transmittance zinc oxide film can be prepared by CBD, which makes the process readily applicable for a roll-to-roll process.
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References
T. Minami, H. Sonohara, T. Kakumu, and S. Takata, Thin Solid Films 270, 37 (1995).
B. Yaglioglu, Y.J. Huang, H.Y. Yeom, and D.C. Paine, Thin Solid Films 496, 89 (2006).
N. Naghavi, A. Rougier, C. Marcel, C. Guéry, J.B. Leriche, and J.M. Tarascon, Thin Solid Films 360, 233 (2000).
S. Masuda, K. Kitamura, Y. Okumura, S. Miyatake, H.␣Tabata, and T. Kawai, J. Appl. Phys. 93, 3 (2003).
N.W. Emanetoglu, C. Gorla, S. Liang, and Y. Lu, IEEE Internat. Frequency Control Symp. 790 (1998).
E. Dumont, B. Dugnoille, and S. Bienfait, Thin Solid Films 353, 93 (1999).
C.H. Lee and L.Y. Lin, Appl. Surf. Sci. 92, 163 (1996).
S.H. Bae, S.Y. Lee, H.Y. Kim, and S. Im, Opt. Mater. 17, 327 (2001).
A. Jim and R. Sufirez, J. Cryst. Growth 167, 649 (1996).
D.H. Bao, A. Kuang, and H. Gu, Thin Solid Films 312, 37 (1998).
X.D. Gao, X.M. Li, and W.D. Yu, J. Solid State Chem. 177, 3830 (2004).
H.C. Cheng, C.F. Chen, and C.C. Lee, Thin Solid Films 498, 142 (2006).
U. Choppali and B.P. Gorman, J. Lumin. 128, 1641 (2008).
J.H. Ko, I.H. Kim, D. Kim, K.S. Lee, T.S. Lee, J.H. Jeong, B.␣Cheong, Y.J. Baik, and W.M. Kim, Thin Solid Films 494, 42 (2006).
W. Liu, G. Du, Y. Sun, Y. Xu, T. Yang, X. Wang, Y. Chang, and F. Qiu, Thin Solid Films 515, 3057 (2007).
T. Minami, H. Sonohara, T. Kakumu, and S. Takata, Jpn. J. Appl. Phys. 34, L971 (1995).
S.Y. Myong and K.S. Lim, Appl. Phys. Lett. 82, 3026 (2003).
E.G. Fu, D.M. Zhuang, G. Zhang, M. Zhao, W.-F. Yang, and J.-F. Liu, Microelectron. J. 35, 383 (2004).
C.J. Gawlak and C.P. Aita, J. Vac. Sci. Technol. A1, 415 (1983).
N. Ito, Y. Sato, P.K. Song, A. Kaijio, K. Inoue, and Y. Shigesato, Thin Solid Films 496, 99 (2006).
R. Hong, J. Huang, H. He, Z. Fan, and J. Shao, Appl. Surf. Sci. 242, 346 (2005).
S.S. Lin, J.L. Huang, and P. Sajgalik, Surf. Coat. Technol. 185, 254 (2004).
I.K. El Zawawi and R.A. Abd Alla, Thin Solid Films 339, 314 (1999).
T. Minami, S. Takata, T. Kakumu, and H. Sonohara, Thin Solid Films 270, 22 (1995).
B.Y. Oh, M.C. Jeong, D.S. Kim, W. Lee, and J.M. Myoung, J.␣Cryst. Growth 281, 475 (2005).
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Luo, WH., Tsai, TK., Yang, JC. et al. Enhancement in Conductivity and Transmittance of Zinc Oxide Prepared by Chemical Bath Deposition. J. Electron. Mater. 38, 2264–2269 (2009). https://doi.org/10.1007/s11664-009-0900-6
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DOI: https://doi.org/10.1007/s11664-009-0900-6