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Growth of Graphene-Like Structures on an Oxidized SiC Surface

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Graphene-like structures were formed on an oxidized SiC (0001) surface following thermal annealing in a vacuum at high temperatures. The SiO2/SiC structure was annealed at 1350°C in 10−5 Torr; the SiO2 layer was vaporized, and two layer graphene-like structures were formed on the SiC surface. This method of fabricating graphene did not require an ultra-high vacuum. In the absence of the oxide layer, a film of vertical carbon nanotubes (CNTs) was grown on the SiC surface in the same temperature range at 10−5 Torr.

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ACKNOWLEDGEMENTS

The authors at Fisk University acknowledge support from Army Research Office (ARO) (W911NF-05-1-0460, the program manger, Dr. Charles Lee, at Air Force Office of Scientific Research (AFOSR)) and National Science Foundation (NSF) through the Center of Physics and Chemistry of Materials (HRD-0420516), and the Air Force Research Laboratory (AFRL) personnel acknowledge the support of AFOSR (Dr. Donald Silversmith). W. Lu acknowledges support from the Air Force Research Laboratory as a visiting scientist in the summer, 2007, through the Universal Technology Corporation (07-T583-004-C1). The authors thank Mr. David C. Liptak at AFRL for assistance with the Raman measurements.

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Authors and Affiliations

  1. Department of Chemistry and Center for Physics and Chemistry of Materials, Fisk University, Nashville, TN, 37208, USA

    Weijie Lu

  2. Air Force Research Laboratory, Materials and Manufacturing Directorate, Wright-Patterson Air Force Base, OH, 45433, USA

    W.C. Mitchel & J.J. Boeckl

  3. Department of Physics and Center for Physics and Chemistry of Materials, Fisk University, Nashville, TN, 37208, USA

    Tiffany R. Crenshaw & W.E. Collins

  4. Department of Materials Science and Engineering, Northwestern University, Evanston, IL, 60208, USA

    R.P.H. Chang

  5. Institute of Advanced Materials, Devices, and Nanotechnology, Rutgers University, Piscataway, NJ, 08854, USA

    L.C. Feldman

  6. Department of Physics and Astronomy, Vanderbilt University, Nashville, TN, 37235, USA

    L.C. Feldman

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  1. Weijie Lu
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  2. W.C. Mitchel
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  3. J.J. Boeckl
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  4. Tiffany R. Crenshaw
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  5. W.E. Collins
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  7. L.C. Feldman
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Correspondence to Weijie Lu.

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Lu, W., Mitchel, W., Boeckl, J. et al. Growth of Graphene-Like Structures on an Oxidized SiC Surface. J. Electron. Mater. 38, 731–736 (2009). https://doi.org/10.1007/s11664-009-0715-5

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  • DOI: https://doi.org/10.1007/s11664-009-0715-5

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