Abstract
A compositionally graded CdTe-Hg1−xCdxTe interface was created by deposition of CdTe on p-HgCdTe and subsequent annealing. The compositionally graded layer between CdTe and HgCdTe was formed by an interdiffusion process and was used for passivation. The composition gradient (Δx) in the interfacial region and the width of the graded region were tailored by adopting a suitable annealing procedure. The effect of process conditions on the interfacial profile and photoelectric properties such as lifetime and surface recombination velocity was studied in detail. Surface recombination velocity of the p-HgCdTe could be reduced to the level of 3,000 cm/s at 77 K, which represents very good passivation characteristics. The passivation layer formed by this method can be used for the fabrication of high performance and stable modern infrared detectors. Thus, a passivation process is developed, which is simple, effective, reproducible, and compatible with the HgCdTe device fabrication and packaging processes.
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References
O.P. Agnihotri, C.A. Musca, and L. Faraone, Semicond. Sci. Technol. 13, 839 (1998).
Y. Nemirovski, N. Mainzer, and E. Wiess, Narrow Gap II–VI Compound Semiconductors, ed. P. Capper (London: INSPEC, 1994), p. 284.
G. Sarusi, G. Cinader, A. Zemel, and D. Eger, J. Appl. Phys. 71, 5070 (1992).
A. Sher, M. Van Schilfgarde, A.B. Chen, and W. Chen, Phys. Rev. B: Condens. Matter Mater. Phys. 36, 4279 (1987).
Y. Nemirovsky, N. Amir, D. Goren, G. Asa, N. Mainzer, and E. Weiss, J. Electron. Mater. 24, 1161 (1995).
V. Ariel, V. Garber, D. Rosenfeld, G. Bahir, V. Richter, N. Mainzer, and A. Sher, J. Electron. Mater. 24, 1169 (1995).
S.Y. An, J.S. Kim, D.W. Seo, and S.H. Suh, J. Electron. Mater. 31, 683 (2002).
C.A. Cockrum, D.R. Rhiger, and E.F. Schulte, U.S. patent 5,880,510 (1999).
J.M. Dell, T. Nguyen, C.A. Musca, J. Antoszwski, L. Faraone, and R. Pal, Mater. Res. Soc. Symp. Proc. 744, M.9.6.1 (2003).
R. Pal, P.K. Chaudhury, B.R. Aneja, V. Gopal, and V. Kumar, Indian patent 1378/DEL (2003).
S. Bothara, S.D. Tyagi, S.K. Gandhi, and J.M. Borrego, Proc. 21st Photovoltaic Specialist Conf., (Piscataway, NJ: IEEE, 1990), p. 404.
S.H. Shin, J.M. Arias, D.D. Edwall, M. Zandian, J.G. Pasko, and R.E. DeWames, J. Vac. Sci. Technol. B 10 4, 1492 (1992).
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Pal, R., Malik, A., Srivastav, V. et al. Compositionally graded interface for passivation of HgCdTe photodiodes. J. Electron. Mater. 35, 1793–1800 (2006). https://doi.org/10.1007/s11664-006-0159-0
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DOI: https://doi.org/10.1007/s11664-006-0159-0