Abstract
A combination of room-temperature photoluminescence (PL) mapping, low-temperature PL spectroscopy, and resistivity mapping was applied to establish the origin of resistivity variations in different types of semi-insulating (SI) 6H-SiC substrates. Direct correlation between the native-defect PL and resistivity was found in undoped (V-free) SI samples. The regions with high PL intensity also showed high resistivity, indicating that native point defects are associated with the compensation mechanism in those substrates and its nonhomogeneity. A more complex correlation was established for the vanadium-doped samples. In these samples, V-related PL and native point defect-related PL were both present at room temperature. While there was no clear correlation between the resistivity maps and the maps of PL intensity measured at either of the two peaks separately, the resistivity was in good correlation with the total PL signal consisting of both vanadium and intrinsic defect contributions. The resistivity of those wafers was apparently due to the contribution of both V-related and native point defect-related deep levels.
Similar content being viewed by others
References
D.L. Barrett, H.M. Hobgood, J.P. McHugh, and R.H. Hopkins, U.S. patent 5,611,955 (18 March 1997).
H.M. Hobgood, R.C. Glass, G. Augustine, R.H. Hopkins, J. Jenny, M. Skowronski, W.C. Mitchell, and M. Roth, Appl. Phys. Lett. 66, 1364 (1995).
B. Magnusson, A. Ellison, and E. Janzen, Mater. Sci. Forum 389–393, 505 (2002).
Mt. Wagner, B. Magnusson, W.M. Chen and E. Janzen, Mater. Sci. Forum 389–393, 509 (2002).
M. Yoganathan et al. (Proc. MRS Fall Meeting, San Francisco, CA, April 12–16, 2004).
M.E. Zvanut, V.V. Konovalov, H. Wang, W.C. Mitchell, W.D. Mitchell, and G. Landis, J. Appl. Phys. 96, 5484 (2004).
Y. Koshka, S. Ostapenko, and I. Tarasov, Appl. Phys. Lett. 74, 1555 (1999).
S. Ostapenko, Y.M. Suleimanov, I. Tarasov, S. Lulu, and S.E. Saddow, J. Phys. Condens. Matter 14, 13381 (2002).
B. Magnusson and E. Janzen, Mater. Sci. Forum 483–485, 341 (2005).
S.K. Chanda, Y. Koshka, and M. Yoganathan (Paper presented at the Int. Conf. on Silicon Carbide and Related Materials 2005, Pittsburgh, PA, Sept. 18–23, 2005).
Author information
Authors and Affiliations
Rights and permissions
About this article
Cite this article
Chanda, S.K., Koshka, Y. & Yoganathan, M. Relationship between infrared photoluminescence and resistivity in semi-insulating 6H-SiC. J. Electron. Mater. 35, 630–634 (2006). https://doi.org/10.1007/s11664-006-0111-3
Received:
Accepted:
Issue Date:
DOI: https://doi.org/10.1007/s11664-006-0111-3