Abstract
The electrical properties of several metal contacts to n-type ZnO (0001) were studied. The ZnO samples consisted of bulk single-crystal material, epitaxial layers on sapphire grown by molecular beam epitaxy (MBE), and polycrystalline thin films on sapphire obtained by pulsed laser deposition (PLD). Ohmic and rectifying contacts were observed dependent upon both the metal material and the ZnO surface. Ohmic contacts were characterized using the circular transmission line method (c-TLM), where contact resistivity was found to be in the range of 10−4−10−5 Ω-cm2. Schottky behavior was observed using Ag contacts exhibiting varying leakage current and breakdown voltage dependent on the polarity of the ZnO surface.
Similar content being viewed by others
References
A.Y. Polyakov, N.B. Smirnov, E.A. Kozhukhova, V.I. Vdovin, K. Ip, Y.W. Heo, D.P. Norton, and S.J. Pearton, Appl. Phys. Lett. 83, 1575 (2003).
S. Liang, H. Sheng, Y. Liu, Z. Huo, Y. Lu, and H. Shen, J. Cryst. Growth 225, 110 (2001).
H.V. Wenckstern, E.M. Kaidashev, M. Lorenz, H. Hochmuth, G. Biehne, J. Lenzner, V. Gottschaich, R. Pickenhain, and M. Grundmann, Appl. Phys. Lett. 84, 79 (2004).
W.T. Petrie and J.M. Vohs, J. Chem. Phys. 101, 8098 (1994).
K. Ip, Y.W. Heo, K.H. Baik, D.P. Norton, S.J. Pearton, and F. Ren, Appl. Phys. Lett. 84, 544 (2004).
J.M. Lee, K.K. Kim, S.J. Park, and W.K. Choi, Appl. Phys. Lett. 78, 3842 (2001).
H. Tampo, A. Yamada, P. Fons, H. Shibata, K. Matsubara, K. Iwata, K. Nakahara, and S. Niki, Phys. Status Solidi C 1, 888 (2004).
A.N. Mariano and R.E. Hanneman, J. Appl. Phys. 34, 384 (1963).
G.S. Marlow and M.B. Das, Solid State Electron. 25, 91 (1982).
H.K. Kim, K.K. Kim, S.J. Park, T.Y. Seong, and I. Adesida, J. Appl. Phys. 94, 4225 (2003).
H.K. Kim, S.H. Han, T.Y. Seong, and W.K. Choi, Appl. Phys. Lett. 77, 1647 (2000).
S.M. Sze, Semiconductor Devices: Physics and Technology (New York: Wiley, 1985), p. xi.
H. Sheng, S. Muthukumar, N.W. Emanetoglu, and Y. Lu, Appl. Phys. Lett. 80, 2132 (2002).
S.M. Sze and G. Gibbons, Appl. Phys. Lett. 8, 111 (1966).
Author information
Authors and Affiliations
Rights and permissions
About this article
Cite this article
Murphy, T.E., Blaszczak, J.O., Moazzami, K. et al. Properties of electrical contacts on bulk and epitaxial n-type ZnO. J. Electron. Mater. 34, 389–394 (2005). https://doi.org/10.1007/s11664-005-0116-3
Received:
Accepted:
Issue Date:
DOI: https://doi.org/10.1007/s11664-005-0116-3