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Crystallization behavior and ferroelectric properties of PbTiO3/Ba0.85Sr0.15TiO3/PbTiO3 sandwich thin film on Pt/Ti/SiO2/Si substrates

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Abstract

A PbTiO3/Ba0.85Sr0.15TiO3/PbTiO3 (PT/BST15/PT) sandwich thin film has been prepared on Pt/Ti/SiO2/Si substrates by an improved sol-gel technique. It is found that such films under rapid thermal annealing at 700°C crystallize more favorably with the addition of a PbTiO3 layer. They possess a pure, perovskite-phase structure with a random orientation. The polarization-electric field (P-E) hysteresis loop and current-voltage (I-V) characteristic curves reveal that a PT/BST15/PT film exhibits good ferroelectricity at room temperature. However, no sharp peak, only a weak maximum, is observed in the curves of the dielectric constant versus temperature. The dielectric constant, loss tangent, leakage current density at 20 kV/cm, remnant polarization, and coercive field of the PT/BST15/PT film are 438, 0.025, 1.3 × 10−6 Acm−2, 2.46 µCcm−2, and 41 kVcm−1, respectively, at 25°C and 10 kHz. The PT/BST15/PT film is a candidate material for high sensitivity elements for uncooled, infrared, focal plane arrays (UFPAs) to be used at near ambient temperature.

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References

  1. K.C. Liddiard, SPIE 2746, 72 (1996).

    Article  Google Scholar 

  2. J.F. Scott, F.M. Ross, M.C. Scott, and M. Huffman, Ann. Rev. Mater. Sci. 28, 79 (1998).

    Article  CAS  Google Scholar 

  3. D. Dimos and H.C. Mueller, Ann. Rev. Mater. Sci. 28, 397 (1998).

    Article  CAS  Google Scholar 

  4. C. Hanson, SPIE 1735, 17 (1992).

    Article  Google Scholar 

  5. S. Nishiki, K. Murani, and A. Ohkoshi, J. Am. Ceram. Soc. 65, 554 (1998).

    Article  Google Scholar 

  6. M.D. Liu, S.B. Liu, Y.K. Zeng, and C.R. Li, Piezoelectr. Acoustooptics 23, 41 (2001).

    Google Scholar 

  7. M.D. Liu, P.Y. Wang, and Y.K. Zeng, Integr. Ferroelectr. 5, 303 (1994).

    CAS  Google Scholar 

  8. H. Frey and D.A. Payne, Appl. Phys. Lett. 63, 2753 (1993).

    Article  CAS  Google Scholar 

  9. M.D. Liu, P.Y. Wang, and C.R. Li, Sens. Actuators 49, 191 (1995).

    Article  Google Scholar 

  10. S. Chen, M.D. Liu, and C.R. Li, Thin Solid Films 375, 288 (2000).

    Article  Google Scholar 

  11. J.S. Sun and S.G. Yoon, Integr. Ferroelectr. 24, 65 (1999).

    Google Scholar 

  12. D.M. Tahan, A. Safari, and L.C. Klein, J. Am. Ceram. Soc. 7, 1593 (1996).

    Article  Google Scholar 

Download references

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Authors and Affiliations

  1. Micro Nano Fabrication Laboratory, Institute of Electrical Engineering, Chinese Academy of Science, 100080, Beijing, People’s Republic of China

    Shaobo Liu, Yanqiu Li & Meidong Liu

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  1. Shaobo Liu
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  2. Yanqiu Li
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  3. Meidong Liu
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Liu, S., Li, Y. & Liu, M. Crystallization behavior and ferroelectric properties of PbTiO3/Ba0.85Sr0.15TiO3/PbTiO3 sandwich thin film on Pt/Ti/SiO2/Si substrates. J. Electron. Mater. 32, 1085–1089 (2003). https://doi.org/10.1007/s11664-003-0092-4

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  • DOI: https://doi.org/10.1007/s11664-003-0092-4

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