Skip to main content
SpringerLink
Log in

Magnetism in SiC implanted with high doses of Fe and Mn

  • Special Issue Paper
  • Published:
Journal of Electronic Materials Aims and scope Submit manuscript

Abstract

High concentrations (0.1–5 at.%) of Mn or Fe were introduced into the near-surface region (≤2000 Å) of 6H-SiC substrates by direct implantation at ∼300°C. After annealing at temperatures up to 1000°C, the structural properties were examined by transmission electron microscopy (TEM) and selected-area diffraction pattern (SADP) analysis. The magnetic properties were examined by SQUID magnetometry. While the Mn-implanted samples were paramagnetic over the entire dose range investigated, the Fe-implanted material displayed a ferromagnetic contribution present at <175 K for the highest dose conditions. No secondary phases were detected, at least not to the sensitivity of TEM or SADP.

This is a preview of subscription content, log in via an institution to check access.

Access this article

Log in via an institution

Price excludes VAT (USA)
Tax calculation will be finalised during checkout.

Instant access to the full article PDF.

Institutional subscriptions

Similar content being viewed by others

References

  1. H. Ohno, A. Shen, F. Matsukura, A. Oiwa, A. Endo, S. Katsumoto, and Y. Iye, Appl. Phys. Lett. 69, 363 (1996).

    Article  CAS  Google Scholar 

  2. T. Hayashi, M. Tanaka, T. Nishinaga, and H. Shimada, J. Appl. Phys. 81, 4865 (1997).

    Article  CAS  Google Scholar 

  3. S. Koshihara, A. Oiwa, M. Hirasawa, S. Katsumoto, Y. Iye, C. Urano, H. Takagi, and H. Munekata, Phys. Rev. Lett. 78, 4617 (1997).

    Article  CAS  Google Scholar 

  4. A. Van Esch, L. Van Bockstal, J. de Boeck, G. Verboenck, A. van Steenbergen, B. Grieteas, R. Bogaerts, F. Herlach, and G. Borghs, Phys. Rev. B 56, 13103 (1997).

    Article  Google Scholar 

  5. H. Akinaga, S. Nemeth, J. de Boeck, L. Nistor, H. Bender, G. Borghs, H. Ofuchi, and M. Oshima, Appl. Phys. Lett. 77, 4377 (2000).

    Article  CAS  Google Scholar 

  6. G.A. Prinz, Science 282, 1660 (1998).

    Article  CAS  Google Scholar 

  7. D.D. Awschalom and R.K. Kawakami, Nature 408, 923 (2000).

    Article  CAS  Google Scholar 

  8. H. Ohno, D. Chihu, F. Matsukura, T. Omiya, E. Abe, T. Diehl, Y. Ohno, and K. Ohtani, Nature 408, 944 (2000).

    Article  CAS  Google Scholar 

  9. B.T. Jonker, Y.D. Park, B.R. Bennet, H.D. Cheong, G. Kioseoglou, and A. Petrou, Phys. Rev. B 62, 8181 (2000).

    Article  Google Scholar 

  10. Y.D. Park, B.T. Jonker, B.R. Bennet, G. Itkos, M. Furis, G. Kioseoglou, and A. Petrou, Appl. Phys. Lett. 77, 3989 (2000).

    Article  CAS  Google Scholar 

  11. T. Dietl, H. Ohno, F. Matsukura, J. Cibert, and D. Ferrand, Science 289, 1019 (2000)

    Article  Google Scholar 

  12. Y. Matsumoto, M. Morakami, T. Shono, T. Hasegawa, T. Fukumura, P. Ahmet, T. Chikyow, S. Koshikata, and H. Koinuma, Science 291, 854 (2001).

    Article  CAS  Google Scholar 

  13. G. Medvedkin, T. Ishihashi, T. Nishi, K. Hoyata, Y. Hasegawa, and K. Sato, Jpn. J. Appl. Phys. 39, L949 (2000).

    Google Scholar 

  14. K. Sato and H. Katayama-Yoshida, Jpn. J. Appl. Phys. 39, L555 (2000).

    Google Scholar 

  15. N. Theodoropoulou, A.F. Hebard, M.E. Overberg, C.R. Abernathy, S.J. Pearton, S.N.G. Chu, and R.G. Wilson, Appl. Phys. Lett. 78, 3475 (2001).

    Article  CAS  Google Scholar 

  16. See, for example, G.L. Harris, ed., Properties of SiC, EMIS Data Review 13 (London: IEEE and INSPEC, 1995) and references therein.

    Google Scholar 

  17. Calculated from PROFILE-CODE, available from Implant Sciences, Wakefield, MA 01880-1246.

Download references

Author information

Authors and Affiliations

  1. Department of Materials Science and Engineering, University of Florida, 32611, Gainesville, FL

    S. J. Pearton, K. P. Lee, M. E. Overberg & C. R. Abernathy

  2. Department of Physics, University of Florida, USA

    N. Theodoropoulou & A. F. Hebard

  3. Stevenson Ranch, 93181, CA

    R. G. Wilson (Consultant)

  4. Agere Systems, 07974, Murray Hill, NJ

    S. N. G. Chu

  5. Army Research Office, 27709, Research Triangle Park, NC

    J. M. Zavada

Authors
  1. S. J. Pearton
    View author publications

    You can also search for this author in PubMed Google Scholar

  2. K. P. Lee
    View author publications

    You can also search for this author in PubMed Google Scholar

  3. M. E. Overberg
    View author publications

    You can also search for this author in PubMed Google Scholar

  4. C. R. Abernathy
    View author publications

    You can also search for this author in PubMed Google Scholar

  5. N. Theodoropoulou
    View author publications

    You can also search for this author in PubMed Google Scholar

  6. A. F. Hebard
    View author publications

    You can also search for this author in PubMed Google Scholar

  7. R. G. Wilson
    View author publications

    You can also search for this author in PubMed Google Scholar

  8. S. N. G. Chu
    View author publications

    You can also search for this author in PubMed Google Scholar

  9. J. M. Zavada
    View author publications

    You can also search for this author in PubMed Google Scholar

Rights and permissions

Reprints and permissions

About this article

Cite this article

Pearton, S.J., Lee, K.P., Overberg, M.E. et al. Magnetism in SiC implanted with high doses of Fe and Mn. J. Electron. Mater. 31, 336–339 (2002). https://doi.org/10.1007/s11664-002-0078-7

Download citation

  • Received:

  • Accepted:

  • Issue Date:

  • DOI: https://doi.org/10.1007/s11664-002-0078-7

Key words

Search

Navigation