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In-situ transmission electron microscopy study of the nanoindentation behavior of Al

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Nanoindentation is a useful technique for investigating fundamental mechanisms associated with small-volume deformation, processes that are often obscured on coarser scales. Recently, a novel experimental technique of in-situ nanoindentation for the transmission electron microscope (TEM), which provides real-time observations of the mechanisms associated with localized deformation, has been developed. Calibration of the force-displacement-voltage relation and load-frame compliance associated with this instrument allows quantitative force-displacement measurements to be obtained in the manner of traditional indentation experiments. Here, we describe the experimental technique along with methods for quantifying the load-displacement response. Additionally, results from experiments into Al thin films are presented.

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  1. J.B. Pethica, R. Hutchings, and W.C. Oliver, Phil. Mag. A 48, 593 (1983).

    CAS  Google Scholar 

  2. W.C. Oliver and G.M. Pharr, J. Mater. Res. 7, 1564 (1992).

    CAS  Google Scholar 

  3. A. Gouldstone, H.-J. Koh, K.-Y. Zeng, A.E. Giannakopoulos, and S. Suresh, Acta Mater. 48, 2277 (2000).

    Article  CAS  Google Scholar 

  4. W.W. Gerberich, J.C. Nelson, E.T. Lilleodden, P. Anderson, and J.T. Wyrobek, Acta Mater. 44, 3585 (1996).

    Article  CAS  Google Scholar 

  5. V. Domnich, Y. Gogotsi, and S. Dub, Appl. Phys. Lett. 76, 2214 (2000).

    Article  CAS  Google Scholar 

  6. For example, Nanoindenter XP, MTS Corp., Minneapolis, MN.

  7. J.B. Pethica and W.C. Oliver, Thin Films: Stresses and Mechanical Properties, Proceedings of the Materials Research Society, ed. J.C. Bravman, W.D. Nix, D.M. Barnett, D.M. Smith and D.A. Smith, (Pittsburgh, PA: Materials Research Soc., 1989), pp. 13–23.

    Google Scholar 

  8. K.L. Johnson, Contact Mechanics (Cambridge, United Kingdom: Cambridge University Press, 1985).

    Google Scholar 

  9. M. Wall and U. Dahmen, Microsc. Microanalysis, 3, 593 (1997).

    Google Scholar 

  10. A.M. Minor, J.W. Morris, and E.A. Stach, Appl. Phys. Lett. 79, 1625 (2001).

    Article  CAS  Google Scholar 

  11. E.T. Lilleodden (Ph.D. thesis, Stanford University, 2001).

  12. E.T. Lilleodden and W.D. Nix, submitted to Acta. Mat. (2002).

  13. S.G. Cocoran, R.J. Colton, E.T. Lilleodden, and W.W. Gerberich, Phys. Rev. B 55, R16057 (1997).

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Minor, A.M., Lilleodden, E.T., Stach, E.A. et al. In-situ transmission electron microscopy study of the nanoindentation behavior of Al. J. Electron. Mater. 31, 958–964 (2002).

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