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In-situ transmission electron microscopy study of the nanoindentation behavior of Al

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Abstract

Nanoindentation is a useful technique for investigating fundamental mechanisms associated with small-volume deformation, processes that are often obscured on coarser scales. Recently, a novel experimental technique of in-situ nanoindentation for the transmission electron microscope (TEM), which provides real-time observations of the mechanisms associated with localized deformation, has been developed. Calibration of the force-displacement-voltage relation and load-frame compliance associated with this instrument allows quantitative force-displacement measurements to be obtained in the manner of traditional indentation experiments. Here, we describe the experimental technique along with methods for quantifying the load-displacement response. Additionally, results from experiments into Al thin films are presented.

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Minor, A.M., Lilleodden, E.T., Stach, E.A. et al. In-situ transmission electron microscopy study of the nanoindentation behavior of Al. J. Electron. Mater. 31, 958–964 (2002). https://doi.org/10.1007/s11664-002-0028-4

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  • DOI: https://doi.org/10.1007/s11664-002-0028-4

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