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The influence of high-temperature annealing on SiC schottky diode characteristics

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Abstract

The influence of high temperature (up to 800C) annealing on the current-voltage characteristics of n-type 6H-SiC Schottky diodes is presented. Our experimental results indicate that high-temperature annealing can result in the improvement of the forw ard and reverse electrical characteristics of SiC Schottky diodes by repairing any leaky low barrier secondary diode parallel to the primary diode that may be present due to the barrier inhomogeneities at the Schottky contact interface.

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Authors and Affiliations

  1. Department of Electrical Engineering, University of South Carolina, 29208, Columbia, SC, USA

    Q. Zhang & T. S. Sudarshan

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  1. Q. Zhang
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  2. T. S. Sudarshan
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Zhang, Q., Sudarshan, T.S. The influence of high-temperature annealing on SiC schottky diode characteristics. J. Electron. Mater. 30, 1466–1470 (2001). https://doi.org/10.1007/s11664-001-0203-z

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  • DOI: https://doi.org/10.1007/s11664-001-0203-z

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