Abstract
The acoustic displacements in a film of indium pressed on to a sapphire wafer were generated by incidence of a Q-switched Nd-YAG laser beam. Acoustic displacements from tungsten film deposited on silicon substrate were also measured by the same technique. Thermoreflectance from a continuous red laser incident on the surface was used simultaneously to measure the acoustic oscillations. The acoustic oscillations were simulated using the solution to the modified wave equation. The acoustic velocity and the modulus of the metal film were determined from the simulation of the experimental results. It is shown that this technique provides a nondestructive method of determination of acoustic velocity and modulus in the metal films.
This is a preview of subscription content, log in via an institution to check access.
Similar content being viewed by others
References
M. Radovic, E. Lara-Curzio and L. Riester, Mat. Sci. Eng., 2004, vol. 368A, pp. 56-70.
ASTM E 1876-09, Standard Test Method for Dynamic Young’s Modulus, Shear Modulus and Poisson’s Ratio by Impulse Excitation, Annual book of ASTM Standards, ASTM International, 100 Barr Harbor Dr, P. O. Box C 700, West Conshohocken, PA 19428-2959.
P. A. Bosom Worth, J. ASTM Int., 2010, vol. 7, pp. 1–15.
A. S. Maxwell, S. Owen-Jones and N. M. Jennet, Rev. Sci. Instrum., 2004, v. 75, pp. 970-975.
ASTM E 756-10, Standard Test Method for Measuring Vibration-Damping Properties of Materials, Annual book of ASTM Standards, ASTM International, 100 Barr Harbor Dr, P. O. Box C 700, West Conshohocken, PA 19428-2959.
J. R. Hutchinson and C. M. Percival, J. Acoust. Soc. America, 1968, vol. 44, pp. 1204-1210.
C. M. Percival and J. A. Cheney, Experimental Mech., 1969, vol. 9, pp. 49-57.
S. Krishnaswamy: in Nondestructive Evaluation, T. Kundu, ed., CRC Press, Washington, DC, 2003, chapt. 7, pp. 436–39.
T. W. Murray, S. Krishnaswamy and J. D. Achenbach, Appl. Phys. Lett., 1999, vol. 74, pp. 3561-3563.
H.-N. Lin, R. J. Stoner, H. J. Marris and J. Tauc, J. Appl. Phys., 1991, vol. 69, pp. 3816-3822.
C. Thomson, H. T. Grahn, H. J. Marris, and J. Tauc, Phys. Rev. B., 1986, vol. 34, pp. 4129-4138.
O. B. Wright, J. Appl. Phys., 1992, vol. 71, pp. 1617-1629.
G. L. Eesley, B. M. Clemens and C. A. Paddock, Appl. Phys. Lett., 1987, vol. 50, pp. 717-720.
M.A. Panzer, G. Zhang, D. Mann, X. Hu, E. Pop, H. Dai, and K.E. Goodson: J. Heat Trans. 2008, vol. 130, pp. 052401-1-9.
H. Zheng and K. Jagannadham, Met. Mat. Trans., 2014, vol. 45A, pp. 2480-2486.
J. P. Hirth and J. Lothe, 2nd edition, Theory of dislocations, Krieger Publishing Company, Malabar, Fl, 1992, p. 183.
A.E. H. Love, A treatise on mathematical theory of elasticity, 1944, Dover publications, New York, 1944, p. 428.
Properties of Indium Given in Metals Hand Book, Desk Edition, Engineering Tables 1–45, 1985, Metals Park, Ohio 44073.
S. Kim and H. Ledbetter, Mat. Sci. Engng., 1998, vol. A32, pp. 139-143.
B. S. Chandrasekhar and J. A. Raine, Phys. Rev., 1961, vol. 124, pp. 1011-1014.
D. R. Winder and C. S. Smith, J. Phys. Chem. Solids,1958, vol. 4, pp. 128-134.
J. P. Hirth and J. Lothe, 2nd edition, Theory of dislocations, Krieger Publishing Company, Malabar, Fl, 1992, p. 837.
C. Thomsen, H. J. Maris and J. Tauc, Thin Solid Films, 1987, vol. 154, pp. 217-223.
Acknowledgments
The author acknowledges partial support of this work from NSF-CMMI.
Author information
Authors and Affiliations
Corresponding author
Additional information
Manuscript submitted May 10, 2014.
Rights and permissions
About this article
Cite this article
Jagannadham, K. Determination of Modulus of Metal Films Using Thermoreflectance. Metall Mater Trans A 46, 229–234 (2015). https://doi.org/10.1007/s11661-014-2598-1
Published:
Issue Date:
DOI: https://doi.org/10.1007/s11661-014-2598-1