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X-Ray Scattering Studies of the Surface Structure of Complex Oxide Films during Layer-by-Layer Growth via Pulsed Laser Deposition

  • Symposium: Neutron and X-Ray Studies of Advanced Materials
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Abstract

We report time-resolved X-ray reflectivity and surface diffuse X-ray scattering measurements of the surface evolution during pulsed laser deposition of SrTiO3 thin films. After developing the scattering theory, we illustrate how these data may used to characterize the kinetics of interlayer transport and of the island size distribution during deposition. We then calculate the density-density correlation function in real space and show that it exhibits the expected features.

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Acknowledgments

This work was supported, in part, by the National Science Foundation (Grant No. DMR-0317729) and, in part, by the Cornell Center for Materials Research (CCMR) with funding from the Materials Research Science and Engineering Center program of the National Science Foundation (Cooperative Agreement No. DMR-0520404) and is based upon research conducted at the CHESS, which is supported by the National Science Foundation and the National Institutes of Health/National Institute of General Medical Sciences under NSF Award No. DMR-0225180.

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Authors and Affiliations

  1. School of Applied and Engineering Physics, Cornell University, Ithaca, NY, 14853, USA

    J.D. Brock (Professor)

  2. Department of Materials Science, Cornell University, Ithaca, NY, 14853, USA

    J.D. Ferguson (Graduate Student)

  3. Cornell High Energy Synchrotron Source, Cornell University, Ithaca, NY, 14853, USA

    A.R. Woll (Staff Scientist)

Authors
  1. J.D. Brock
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  2. J.D. Ferguson
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  3. A.R. Woll
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Corresponding author

Correspondence to J.D. Brock.

Additional information

This article is based on a presentation given in the symposium “Neutron and X-Ray Studies of Advanced Materials,” which occurred February 15–19, 2009, during the TMS Annual Meeting in San Francisco, CA, under the auspices of TMS, TMS Structural Materials Division, TMS/ASM Mechanical Behavior of Materials Committee, TMS: Advanced Characterization, Testing, and Simulation Committee, and TMS: Titanium Committee.

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Brock, J., Ferguson, J. & Woll, A. X-Ray Scattering Studies of the Surface Structure of Complex Oxide Films during Layer-by-Layer Growth via Pulsed Laser Deposition. Metall Mater Trans A 41, 1162–1166 (2010). https://doi.org/10.1007/s11661-009-9910-5

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  • DOI: https://doi.org/10.1007/s11661-009-9910-5

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