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A Comprehensive Review for Micro/Nanoscale Thermal Mapping Technology Based on Scanning Thermal Microscopy

Abstract

Thermal characterization becomes challenging as the material size is reduced to micro/nanoscales. Based on scanning probe microscopy (SPM), scanning thermal microscopy (SThM) is able to collect thermophysical characteristics of the microscopic domain with high spatial resolution. Starting from its development history, this review introduces the operation mechanism of the instrument in detail, including working principles, thermal probes, quantitative study, and applications. As the core principle of SThM, the heat transfer mechanism section is discussed emphatically. Additionally, the emerging technologies based on the SThM platform are clearly reviewed and corresponding examples are presented in detail. Finally, the current challenges and future opportunities of SThM are discussed.

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Acknowledgment

The authors acknowledge funding from the National Natural Science Foundation of China (51876112) and Shanghai Sailing Program (21YF1414200), Discipline of Shanghai-Materials Science and Engineering, and Shanghai Engineering Research Center of Advanced Thermal Functional Materials.

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Correspondence to Wei Yu.

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Li, Y., Zhang, Y., Liu, Y. et al. A Comprehensive Review for Micro/Nanoscale Thermal Mapping Technology Based on Scanning Thermal Microscopy. J. Therm. Sci. 31, 976–1007 (2022). https://doi.org/10.1007/s11630-022-1654-1

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  • DOI: https://doi.org/10.1007/s11630-022-1654-1

Keywords

  • micro/nanoscale thermal mapping
  • scanning thermal microscopy
  • interfacial heat transfer
  • thermoelectrics