Journal of Thermal Science

, Volume 27, Issue 3, pp 241–248 | Cite as

Experimental Study of Static Contact-angle on Peak-like Microstructural Surfaces Produced by PIII Technology

  • Runhua Yang
  • Lixin Yang


Plasma immersion ion implantation (PIII) was used to fabricate micro/nano structures on monocrystalline Si surfaces with different ratios of mixed gases (SF6/O2). The micro/nano structures on the surfaces of the sample were characterized by scanning electron microscopy (SEM) and atomic force microscopy (AFM). The results showed that with increasing ratio of mixed gases (SF6/O2), the height of the micro/nano structures first increased and then decreased. Contact-angle measurements indicated that the surfaces’ micro/nano structures have an obvious effect on the contact-angle, and could cause a change in surface wettability. The theoretical analysis of contact-angle showed that the Wenzel and Cassie theories cannot predict the contact-angle of a roughened surface accurately, and should be corrected for practical applications using an actual model. Moreover, the contact-angle first increased and then decreased with increasing ratio of mixed gases (SF6/O2), which is in accordance with the change of the height of micro/nano structures.


Plasma Immersion Ion Implantation (PIII) Scanning Electron Microscopy (SEM) Atomic Force Microscopy (AFM) Micro/nano Structure Surface Contact-angle 


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Copyright information

© Science Press, Institute of Engineering Thermophysics, CAS and Springer-Verlag GmbH Germany, part of Springer Nature 2018

Authors and Affiliations

  1. 1.Institute of Thermal Engineering, School of Mechanical, Electronic and Control EngineeringBeijing Jiaotong UniversityBeijingChina
  2. 2.Beijing Key Laboratory of Flow and Heat Transfer of Phase Changing in Micro and Small ScaleBeijingChina

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