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Combustion synthesis of SiO2 on the aluminum plate

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Abstract

The approach of utilizing combustion synthesis to make fine particles of SiO2, Al2O3 and TiO2 is a quite modern technology. Through the chemical reaction in post-flame region, fine SiO2 particles can be formed with high purity on plate surface. Therefore, the combustion synthesis of SiO2 powders is an important area for further research and development, especially for the application of SiO2 in the semiconductor industry. This investigation proposes an experimental approach (i.e., a gas-phase combustion synthesis) using two different kinds of organic compounds, Hexamethyldisilazane (HMDSA) and Hexamethyldisioxane (HMDSO), as the silicon precursors. A premixed gas burner is chosen with C3H8 as fuel, air as oxidant and part of the air was used as the carrying gas to entrain HMDSA/HMDSO vapor into the combustible mixture. Observations show that the C3H8/air flame changed color from a pale-blue flame to light yellow and then orange when different amounts of precursors were introduced. Through the chemical reaction in the post-flame region, fine SiO2 particles were formed in the gas phase and then quenched and collected on an aluminum flat plate. The objective of this paper is to study the effects of HMDSO and HMDSA concentrations and flame temperatures on the synthesis of SiO2 particles.

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Authors and Affiliations

  1. Dept. of Mechanical Engineering, Da-Yeh University, 51505, Chang-Hwa, Taiwan

    C. L. Yeh

  2. Department of Mechanical Engineering, National Taiwan University, 107, Taipei, Taiwan

    E. Zhao & H. K. Ma

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  1. C. L. Yeh
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  2. E. Zhao
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  3. H. K. Ma
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Yeh, C.L., Zhao, E. & Ma, H.K. Combustion synthesis of SiO2 on the aluminum plate. J. of Therm. Sci. 10, 92–96 (2001). https://doi.org/10.1007/s11630-001-0017-6

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  • DOI: https://doi.org/10.1007/s11630-001-0017-6

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