Abstract
The thermodynamic phase stability area diagrams of BCl3-NH3-SiCl4-H2-Ar system were plotted via Factsage software to predict the kinetic experimental results. The effects of parameters (i e, partial pressure of reactants, deposition temperature and total pressure) on the distribution regions of solid phase products were analyzed based on the diagrams. The results show that: (a) Solid phase products are mainly affected by deposition temperature. The area of BN+Si3N4 phase increases with the temperature rising from 650 to 900 °C, and decreases with the temperature rising from 900 to 1 200 °C; (b) When temperature and total pressure are constants, BN+Si3N4 phase exists at a high partial pressure of NH3; (c) The effect of total system pressure is correlated to deposition temperature. The temperature ranging from 700 to 900 °C under low total pressure is the optimum condition for the deposition. (d) Appropriate kinetic parameters can be determined based on the results of thermodynamic calculation. Si–B–N coating is obtained via low pressure chemical vapor deposition. The analysis by X-ray photoelectron spectroscopy indicates that B–N and Si–N are the main chemical bonds of the coating.
Similar content being viewed by others
References
Naslain R, Guette A, Rebillat F, et al. Boron-bearing Species in Ceramic Matrix Composites for Long-term Aerospace Applications [J]. Journal of Solid State Chemistry, 2004, 177(2): 449–456
Pierson H O. Boron Nitride Composites by Chemical Vapor Deposition [J]. Journal of Composite Materials, 1975, 9(3): 228–240
Morscher G N, Bryant D R, Tressler R E. Environmental Durability of BN-based Interphases (for SiCf/SiCm Composites) in H2O Containing Atmospheres at Intermediate Temperatures [J]. Ceramic Engineering and Science Proceedings, 1997, 18(3): 525–534
SUN E Y, LIN H T, Brennan J J. Intermediate-temperature Environmental Effects on Boron Nitride-coated Silicon Carbide-fiberreinforced Glass-ceramic Composites [J]. Journal of the American Ceramic Society, 1997, 80(3): 609–614
Luthra K L, Corman G S. Melt Infiltration SiC/SiC Composites for Gas Turbine Applications [C]. High Temperature Ceramic Matrix Composites, Germany, 2001:744–753
Morscher G N, Yun H M, Dicarlo J A, et al. Effect of a Boron Nitride Interphase that Debonds between the Interphase and the Matrix in SiC/ SiC Composites [J]. Journal of the American Ceramic Society, 2004, 87(1): 104–112
Moore A W, Sayir H, Farmer S C, et al. Improved Interface Coatings for SiC Fibers in Ceramic Composites [J]. Ceramic Engineering and Science Proceedings, 1995, 16(4): 409–416
Morscher G N, Cawley J D. Intermediate Temperature Strength Degradation in SiC/SiC Composites [J]. Journal of the European Ceramic Society, 2002, 22: 2777–2787
Corman G S, Luthra K L. Silicon Melt Infiltrated Ceramic Composites (HiperCompTM) [M]. Bansal N P ed. Handbook of Ceramic Composites. New York: Kluwer Academic Publishers, 2005: 99–115
GUO Zhukun, LIN Zuxiang, YAN Dongsheng. High Temperature Phase Equilibrium and Stability Diagram [M]. Shanghai: Shanghai Scientific and Technologic Press, 1987: 173–195(in Chinese)
XU Zhihong, WANG Leshan. Inorganic Thermochemistry Datebase[M]. Beijing: Science Press, 1987: 62(in Chinese)
LIU Yongsheng, LIU Shanhua, ZUO Xinzhang, et al. Research on Stability Diagrams for BCl3–C3H3–H2 System [J]. Chin. Ceram. Soc., 2010, 38(5): 964–968
SONG Shimo, ZHUANG Gonghui, WANG Zhenglie. Physical Chemistry. Beijing: Higher Education Press, 1995: 271–275(in Chinese)
Author information
Authors and Affiliations
Corresponding author
Additional information
Funded by the National Natural Science Foundation of China (Nos. 51002120, 51472201)
Rights and permissions
About this article
Cite this article
Li, Z., Cheng, L., Liu, Y. et al. Thermodynamic analysis of chemical vapor deposition of BCl3-NH3-SiCl4-H2-Ar system. J. Wuhan Univ. Technol.-Mat. Sci. Edit. 30, 951–958 (2015). https://doi.org/10.1007/s11595-015-1256-9
Received:
Accepted:
Published:
Issue Date:
DOI: https://doi.org/10.1007/s11595-015-1256-9