Skip to main content
SpringerLink
Log in

Picosecond laser machining of deep holes in silicon infiltrated silicon carbide ceramics

  • Advanced Materials
  • Published:
Journal of Wuhan University of Technology-Mater. Sci. Ed. Aims and scope Submit manuscript

Abstract

Silicon infiltrated silicon carbide (Si-SiC) ceramics, as high hardness materials, are difficult to machine, especially drilling micro-holes. In this study, the interaction of picosecond laser pulses (1 ps at 1 030 nm) with Si-SiC ceramics was investigated. Variations of the diameter and depth of circular holes with the growth of the laser energy density were obtained. The results indicate that the increase of machining depth follows a nonlinear relation with the increasing of laser energy density, while the diameter has little change with that. Moreover, it is found that some debris and particles are deposited around and inside the holes and waviness is in the entrance and at walls of the holes after laser processing.

This is a preview of subscription content, log in via an institution to check access.

Access this article

Log in via an institution

Price excludes VAT (USA)
Tax calculation will be finalised during checkout.

Instant access to the full article PDF.

Institutional subscriptions

Similar content being viewed by others

References

  1. Paris J Y, Vincent L, Denape J. High-speed Tribological Behavior of a Carbon/Silicon-carbide Composite [J]. Composites Science and Technology, 2001, 61(3): 417–423

    Article  Google Scholar 

  2. Krenkel W, Heidenreich B, Renz R. C/C-SiC Composites for Advanced Friction Systems[J]. Advanced Engineering Materials, 2002, 4(7): 427–436

    Article  Google Scholar 

  3. Schlier L, Zhang W, Travitzky N, et al. Macro-Cellular Silicon Carbide Reactors for Nonstationary Combustion Under Piston Engine-Like Conditions[J]. International Journal of Applied Ceramic Technology, 2011, 8(5): 1 237–1 245

    Article  Google Scholar 

  4. Cohrt H, Thümmler H F. Herstellung, Eigenschaften und Anwendung von Reaktionsgebundenem, Siliziuminfiltriertem Siliziumkarbid[J]. Materials Science and Engineering Technology, 1985, 16(8): 277–285

    Google Scholar 

  5. Richter H, Willmann G, Heider W. Ermüdungsverhalten von SiSiC [J]. Materials Science and Engineering Technology, 1982, 13(10): 355–360

    Google Scholar 

  6. Momma C, Chichkov B N, Nolte S, et al. Short-pulse Laser Ablation of Solid Targets[J]. Optics Communication, 1996, 129(1–2): 134–142

    Article  Google Scholar 

  7. Kautek W, Krüger J, Lenzner M, et al. Laser Ablation of Dielectrics With Pulse Durations between 20 fs and 3 ps[J]. Applied Physics Letters, 1996, 69(21): 3 146–3 148

    Article  Google Scholar 

  8. Chichkov B N, Momma C, Nolte S, et al. Femtosecond, Picosecond and Nanosecond Laser Ablation of Solids[J]. Applied Physics A: Materials Science Processing, 1996, 63(2): 109–115

    Article  Google Scholar 

  9. Kononenko T V, Garnov S V, Klimentov S M, et al. Laser Ablation of Metals and Ceramics in Picosecond-nanosecond Pulsewidth in the Presence of Different Ambient Atmospheres[J]. Applied Surface Science, 1997, 109–110(1): 48–51

    Article  Google Scholar 

  10. Momma C, Nolte S, Chichkov B N, et al. Precise Laser Ablation with Ultrashort Pulses[J]. Applied Surface Science, 1997, 109–110(1): 15–19

    Article  Google Scholar 

  11. Cheng J, Perrie W, Sharp M, et al. Single-pulse Drilling Study on Au, Al and Ti Alloy by Using a Picosecond Laser[J]. Applied Physics A: Materials Science Processing, 2009, 95(3): 739–746

    Article  Google Scholar 

  12. Ancona A, Nodop D, Limpert J, et al. Microdrilling of Metals with an Inexpensive and Compact Ultra-short-pulse Fiber Amplified Microchip Laser[J]. Applied Physics A: Materials Science Processing, 2009, 94(1): 19–24

    Article  Google Scholar 

  13. Hu W Q, Shin Yung C, King Galen B. Micromachining of Metals, Alloys, and Ceramics by Picosecond Laser Ablation[J]. Journal of Manufacturing Science and Engineering, 2010, 132(1): 011 009

    Article  Google Scholar 

  14. Beal V E, Paggi R A, Salmoria G V, et al. Statistical Evaluation of Laser Energy Density Effect on Mechanical Properties of Polyamide Parts Manufactured by Selective Laser Sintering[J]. Journal of Applied Polymer Science, 2009, 113(5): 2 910–2 919

    Article  Google Scholar 

  15. Bonse J, Wrobel J M, Kruger J, et al. Ultrashort-pulse Laser Ablation of Indium Phosphide in Air[J]. Applied Physics A, 2001, 72(1): 89–94

    Article  Google Scholar 

  16. Bandyopadhyay S, Sundar J K S, Sundararajan G, et al. Geometrical Features and Metallurgical Characteristics of Nd:YAG Laser Drilled Holes in Thick IN718 and Ti-6Al-4V Sheets[J]. Journal of Materials Processing Technology, 2002, 127(1): 83–95

    Article  Google Scholar 

  17. Emmony D C, Howson R P, Willis L J. Laser Mirror Damage in Germanium at 10.6 μm[J]. Applied Physics Letters, 1973, 23: 598–600

    Article  Google Scholar 

  18. Ozkan A M, Malshe A, Railkar T A, et al. Femtosecond Laser-induced Periodic Structure Writing on Diamond Crystals and Microclusters[J]. Applied Physics Letters, 1999, 75(23): 3 716–3 718

    Article  Google Scholar 

  19. Zhou G S, Fauchet P M, Siegman A E. Growth of Spontaneous Periodic Surface Structures on Solids During Laser Illumination[J]. Physical Review B, 1982, 26(10): 5 366–5 382

    Article  Google Scholar 

  20. Pedraza A J, Guan Y F, Fowlkes J D, et al. Nanostructures Produced by Ultraviolet Laser Irradiation of Silicon I Rippled Structures[J]. Journal of Vacuum Science and Technology B, 2004, 22(6): 2 823–2 835

    Article  Google Scholar 

  21. Ehrlich D J, Brueck S R J, Tsao J Y. Time-resolved Measurements of Stimulated Surface Polariton Wave Scattering and Grating Formation in Pulsed-laser-annealed Germanium[J]. Applied Physics Letters, 1982, 41(1): 630–632

    Article  Google Scholar 

  22. Wang J C, Guo C L. Ultrafast Dynamics of Femtosecond Laser-induced Periodic Surface Pattern Formation on Metals[J]. Applied Physics Letters, 2005, 87(25): 251 914–251 916

    Article  Google Scholar 

Download references

Author information

Authors and Affiliations

  1. Science and Technology on Thermostructure Composite Materials Laboratory, Northwestern Polytechnical University, Xi’an, 710072, China

    Qing Zhang  (张青), Chunhui Wang, Yongsheng Liu & Litong Zhang

  2. State Key Laboratory of Transient Optics and Photonics, Xi’an Institute of Optics and Precision Mechanics, Chinese Academy of Sciences, Xi’an, 10068, China

    Guanghua Cheng

Authors
  1. Qing Zhang  (张青)
    View author publications

    You can also search for this author in PubMed Google Scholar

  2. Chunhui Wang
    View author publications

    You can also search for this author in PubMed Google Scholar

  3. Yongsheng Liu
    View author publications

    You can also search for this author in PubMed Google Scholar

  4. Litong Zhang
    View author publications

    You can also search for this author in PubMed Google Scholar

  5. Guanghua Cheng
    View author publications

    You can also search for this author in PubMed Google Scholar

Corresponding author

Correspondence to Qing Zhang  (张青).

Additional information

Funded by National Natural Science Foundation of China (Nos.51332004, 51302220, 51472201), the Major National Scientific Instrument and Equipment Development Project (No.2011YQ12007504), Natural Science Foundation of Shaanxi Province (No.2014JQ6197) and the Foundation Research of Northwestern Polytechnical University (No.JC20120204)

Rights and permissions

Reprints and permissions

About this article

Check for updates. Verify currency and authenticity via CrossMark

Cite this article

Zhang, Q., Wang, C., Liu, Y. et al. Picosecond laser machining of deep holes in silicon infiltrated silicon carbide ceramics. J. Wuhan Univ. Technol.-Mat. Sci. Edit. 30, 437–441 (2015). https://doi.org/10.1007/s11595-015-1167-9

Download citation

  • Received:

  • Accepted:

  • Published:

  • Issue Date:

  • DOI: https://doi.org/10.1007/s11595-015-1167-9

Key words

Search

Navigation