Synthesis, characterization, and kinetic study of Mn(DPM)3 used as precursor for MOCVD

Abstract

Highly pure Mn(DPM)3 (DPM-2,2,6,6-tetramethyl-3, 5-heptanedionato) complex, usually used as precursor for metal-organic chemical vapor deposition, was synthesized and characterized by elemental analyses, 1H-NMR spectroscopy, mass spectroscopic analysis, thermogravimetry, and differential scanning calorimetry. The thermal decomposition behavior of the complex is sensitive to the ambient gases, and the oxygen atmosphere will accelerate the decomposition and oxidation of the complex. According to mass spectroscopic analysis at elevated temperature, one of the three DPM groups in Mn(DPM)3 will dissociate primarily, following with dissociation of +C(CH3)3 and +OCCH2COC(CH3)3 groups in sequence. It can be interpreted by the difference of metal ion radius. The kinetic parameters of activation energy and frequency factor were computed using different models and thereinto D2 model best adjusted the experimental isothermal thermogravimetric data.

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Acknowledgments

This work was supported by the National Natural Science Foundation of China under contract no. 20271047.

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Correspondence to Yinzhu Jiang.

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Yan, R., Huang, W., Wang, Q. et al. Synthesis, characterization, and kinetic study of Mn(DPM)3 used as precursor for MOCVD. Ionics 15, 627–633 (2009). https://doi.org/10.1007/s11581-009-0316-6

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Keywords

  • β-Diketonate
  • Metal-organic chemical vapor deposition
  • Thermal decomposition
  • Kinetics