Abstract
Aerosol technology provides efficient methods for producing nanoparticles with well-controlled composition and size distribution. This review provides an overview of methods and results obtained by using aerosol technology for producing nanostructures for a variety of applications in semiconductor physics and device technology. Examples are given from: production of metal and metal alloy particles; semiconductor nanoparticles; semiconductor nanowires, grown both in the aerosol phase and on substrates; physics studies based on individual aerosol-generated devices; and large area devices based on aerosol particles.
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Magnusson, M.H., Ohlsson, B.J., Björk, M.T. et al. Semiconductor nanostructures enabled by aerosol technology. Front. Phys. 9, 398–418 (2014). https://doi.org/10.1007/s11467-013-0405-x
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DOI: https://doi.org/10.1007/s11467-013-0405-x