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Frontiers of Mechanical Engineering

, Volume 12, Issue 2, pp 158–180 | Cite as

Review on the progress of ultra-precision machining technologies

  • Julong Yuan
  • Binghai Lyu
  • Wei Hang
  • Qianfa Deng
Review Article

Abstract

Ultra-precision machining technologies are the essential methods, to obtain the highest form accuracy and surface quality. As more research findings are published, such technologies now involve complicated systems engineering and been widely used in the production of components in various aerospace, national defense, optics, mechanics, electronics, and other high-tech applications. The conception, applications and history of ultra-precision machining are introduced in this article, and the developments of ultra-precision machining technologies, especially ultra-precision grinding, ultra-precision cutting and polishing are also reviewed. The current state and problems of this field in China are analyzed. Finally, the development trends of this field and the coping strategies employed in China to keep up with the trends are discussed.

Keywords

ultra-precision grinding ultra-precision cutting ultra-precision polishing research status in China development tendency 

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Notes

Acknowledgements

The authors gratefully acknowledge the financial support from the National Natural Science Foundation of China (Grant Nos. 51375455, 51575492, 51605440, and U1401247) and the Natural Science Foundation of Zhejiang Province (Grant Nos. LY15E050022, LR17E050002, LY17E050022).

References

  1. 1.
    Yuan Z, Wang X. The Technology of Precision Machining and Ultra-Precision Machining. 3rd ed. Beijing: China Machine Press, 2016 (in Chinese)Google Scholar
  2. 2.
    Editing Committee of Microfabrication Technology. Microfabrication Technology. Beijing: Science Press, 1983 (in Chinese)Google Scholar
  3. 3.
    Komanduri R, Lucca D A, Tani Y. Technological advances in fine abrasive processes. CIRP Annals—Manufacturing Technology, 1997, 46(2): 545–596CrossRefGoogle Scholar
  4. 4.
    Ikawa N, Shimada S. Accuracy problems in ultra-precision metal cutting. Journal of the Japan Society of Precision Engineering, 1986, 52(12): 2000–2004 (in Japanese)CrossRefGoogle Scholar
  5. 5.
    Shimada S, Ikawa N, Tanaka H, et al. Feasibility study on ultimate accuracy in micro-cutting using molecular dynamics simulations. CIRP Annals—Manufacturing Technology, 1993, 42(1): 91–94CrossRefGoogle Scholar
  6. 6.
    Byrne G, Dornfeld D, Denkena B. Advancing cutting technology. CIRP Annals—Manufacturing Technology, 2003, 52(2): 483–507CrossRefGoogle Scholar
  7. 7.
    Edward P, David S, Scott C. MOLDED OPTICS: Molded glass aspheric optics hit the target for precision and cost. Laser Focus World, 2007, 43(12): 71–74Google Scholar
  8. 8.
    Kim H S, Lee K I, Lee K M, et al. Fabrication of free-form surfaces using a long-stroke fast tool servo and corrective figuring with onmachine measurement. International Journal of Machine Tools and Manufacture, 2009, 49(12–13): 991–997CrossRefGoogle Scholar
  9. 9.
    Rakuff S, Cuttino J F. Design and testing of a long-range, precision fast tool servo system for diamond turning. Precision Engineering, 2009, 33(1): 18–25CrossRefGoogle Scholar
  10. 10.
    Tohme Y E, Lowe J A. Machining of freeform optical surfaces by slow slide servo method. In: Proceedings of the American Society for Precision Engineering Annual Meeting. 2003Google Scholar
  11. 11.
    Wei H. Ultra-precision machining & manufacturing of optical devices [EB/OL]. 2011. Retrieved from http://www.vogel.com.cn/ top/mm15/news_t_view.html?id = 188500 (in Chinese)Google Scholar
  12. 12.
    Weck M, Klocke F. Manufacturing and applications of nonrotationally symmetric optics. SPIE Proceedings, Optical Fabrication and Testing, 1999, 3739: 94–107CrossRefGoogle Scholar
  13. 13.
    Gao W. Precision nano-fabrication and evaluation of a large area sinusoidal grid surface for a surface encoder. Precision Engineering, 2003, 27(3): 289–298CrossRefGoogle Scholar
  14. 14.
    Ohmori H, Nakagawa T. Mirror surface grinding of silicon wafers with electrolytic in-process dressing. CIRP Annals—Manufacturing Technology, 1990, 39(1): 329–332CrossRefGoogle Scholar
  15. 15.
    Matsumura T, Hiramatsu T, Shirakashi T, et al. A study on cutting force in the milling process of glass. Journal of Manufacturing Processes, 2005, 7(2): 102–108CrossRefGoogle Scholar
  16. 16.
    Matsumura T, Ono T. Cutting process of glass with inclined ball end mill. Journal of Materials Processing Technology, 2008, 200(1–3): 356–363CrossRefGoogle Scholar
  17. 17.
    Ono T, Matsumura T. Influence of tool inclination on brittle fracture in glass cutting with ball end mills. Journal of Materials Processing Technology, 2008, 202(1–3): 61–69CrossRefGoogle Scholar
  18. 18.
    Foy K, Wei Z, Matsumura T, et al. Effect of tilt angle on cutting regime transition in glass micromilling. International Journal of Machine Tools and Manufacture, 2009, 49(3–4): 315–324CrossRefGoogle Scholar
  19. 19.
    Suzuki H, Moriwaki T, Yamamoto Y, et al. Precision cutting of aspherical ceramic molds with micro PCD milling tool. CIRP Annals—Manufacturing Technology, 2007, 56(1): 131–134CrossRefGoogle Scholar
  20. 20.
    Scheiding S, Eberhardt R, Gebhardt A, et al. Micro lens array milling on large wafers. Optik & Photonik, 2009, 4(4): 41–45CrossRefGoogle Scholar
  21. 21.
    Malkin S, Guo C. Grinding Technology. 2nd ed. South Norwalk: Industrial Press Inc., 2007Google Scholar
  22. 22.
    Su H, Xu H, Fu Y. Reviewthe current questions and strategies about multilayer sintering super abrasive tools and conceive the development of future tools. Chinese Journal of Mechanical Engineering, 2005, 42(3): 12–17CrossRefGoogle Scholar
  23. 23.
    Webster J, Tricard M. Innovations in abrasive products for precision grinding. CIRP Annals—Manufacturing Technology, 2004, 53(2): 597–617CrossRefGoogle Scholar
  24. 24.
    Tannaka T. New development of metal bonded diamond wheel with pore by the growth of bonding bridge. International Journal of the Japan Society for Precision Engineering, 1992, 26(1): 27–32Google Scholar
  25. 25.
    Chattopadhya A K, Chollet L, Hintermann H E. Induction brazing of diamond with diamond Ni-Cr hadfacing alloy under argon atmosphere. Surface and Coatings Technology, 1991, 45(1–3): 293–298CrossRefGoogle Scholar
  26. 26.
    Ikeno J, Tani Y, Sato H. Nanometer grinding using ultrafine abrasive pellets—Manufacture of pellets applying electrophoretic deposition. CIRP Annals—Manufacturing Technology, 1990, 39(1): 341–344CrossRefGoogle Scholar
  27. 27.
    Ohmori H, Nakagawa T. Mirror surface grinding of silicon wafers with electrolytic in-process dressing. CIRP Annals—Manufacturing Technology, 1990, 39(1): 329–332CrossRefGoogle Scholar
  28. 28.
    Kramer D, Rehsteiner F, Schumacher B. ECD (electrochemical inprocess controlled dressing), a new method for grinding of modern high-performance cutting materials to highest quality. CIRP Annals—Manufacturing Technology, 1999, 48(1): 265–268CrossRefGoogle Scholar
  29. 29.
    Wang Y, Zhou X, Hu D. An experimental investigation of dryelectrical discharge assisted truing and dressing of metal bonded diamond wheel. International Journal of Machine Tools and Manufacture, 2006, 46(3–4): 333–342CrossRefGoogle Scholar
  30. 30.
    Suzuki K, Uematsu T, Yanase T, et al. Development of a simplified electrochemical dressing method with twin electrodes. CIRP Annals—Manufacturing Technology, 1991, 40(1): 363–366CrossRefGoogle Scholar
  31. 31.
    Bhattacharyya B, Doloi B N, Sorkhel S K. Experimental investigations into electrochemical discharge machining (ECDM) of non-conductive ceramic materials. Journal of Materials Processing Technology, 1999, 95(1–3): 145–154CrossRefGoogle Scholar
  32. 32.
    Zhang C, Shin Y C. A novel laser-assisted truing and dressing technique for vitrified CBN wheels. International Journal of Machine Tools and Manufacture, 2002, 42(7): 825–835CrossRefGoogle Scholar
  33. 33.
    Hirao M, Izawa M. Water-jet in-process dressing (1st report): Dressing property and jet pressure. Journal of the Japan Society of Precision Engineering, 1998, 64(9): 1335–1339 (in Japanese)CrossRefGoogle Scholar
  34. 34.
    Ikuse Y, Nonokawa T, Kawabatan N, et al. Development of new ultrasonic dressing equipment. Journal of the Japan Society of Precision Engineering, 1995, 61(7): 986–990 (in Japanese)CrossRefGoogle Scholar
  35. 35.
    Ohmori H, Nakagawa T. Analysis of mirror surface generation of hard and brittle materials by ELID (electrolytic in-process dressing) grinding with superfine grain metallic bond wheels. CIRP Annals —Manufacturing Technology, 1995, 44(1): 287–290CrossRefGoogle Scholar
  36. 36.
    Lambropoulos J C, Gillman B E, Zhou Y, et al. Glass-ceramics: Deterministic microgrinding, lapping and polishing. SPIE Proceedings, Optical Manufacturing and Testing II, 1997, 3134: 178–189CrossRefGoogle Scholar
  37. 37.
    Jeff R, Ed F, Dennis V G, et al. Contour grinding results on the NanotechTM 150AG. Convergence, 1999, 7(3): 1–8Google Scholar
  38. 38.
    Zhou L, Eda H, Shimizu J, et al. Defect-free fabrication for single crystal silicon substrate by chemo-mechanical grinding. CIRP Annals—Manufacturing Technology, 2006, 55(1): 313–316CrossRefGoogle Scholar
  39. 39.
    Hang W, Zhou L, Zhang K, et al. Study on grinding of LiTaO3 wafer using effective cooling and electrolyte solution. Precision Engineering, 2016, 44: 62–69CrossRefGoogle Scholar
  40. 40.
    Kasai T, Doy T. Grinding, lapping and polishing technologies under nanometer scale working conditions. Journal of the Japan Society of Precision Engineering, 1993, 59(4): 559–562 (in Japanese)CrossRefGoogle Scholar
  41. 41.
    Wang J, Wang T, Pan G, et al. Effect of photocatalytic oxidation technology on GaN CMP. Applied Surface Science, 2016, 361: 18–24CrossRefGoogle Scholar
  42. 42.
    Yuan J. Ultraprecision Machining of Functional Ceramics. Harbin: Press of Harbin Institute of Technology, 2000 (in Chinese)Google Scholar
  43. 43.
    Mori Y, Ikawa N, Okuda T, et al. Numerically controlled elastic emission machine. Journal of the Japan Society of Precision Engineering, 1980, 46(12): 1537–1544CrossRefGoogle Scholar
  44. 44.
    Uzawa S. Canon’s development status of EUVL technologies. In: Proceedings of the 4th EUVL Symposium. 2005Google Scholar
  45. 45.
    Watanabe J, Suzuki J, Kobayashi A. High precision polishing of semiconductor materials using hydrodynamic principle. CIRP Annals—Manufacturing Technology, 1981, 30(1): 91–95CrossRefGoogle Scholar
  46. 46.
    Namba Y, Tsuwa H. Ultra-fine finishing of sapphire single crystal. CIRP Annals—Manufacturing Technology, 1977, 26(1): 325–329Google Scholar
  47. 47.
    Yasunaga N, Obara A, Tarumi N. Study of mechanochemical effect on wear and its application to surface finishing. Journal of the Japan Society for Precision Engineering, 1977, 776: 50–134Google Scholar
  48. 48.
    Steigerwald J M, Murarka S P, Gutmann R J. Chemical Mechanical Planarization of Microelectronic Materials. New York: John Wiley & Sons Inc., 1996Google Scholar
  49. 49.
    Pirayesh H, Cadien K. Chemical mechanical polishing in the dry lubrication regime: Application to conductive polysilicon. Journal of Materials Processing Technology, 2015, 220: 257–263CrossRefGoogle Scholar
  50. 50.
    Fox M, Agrawal K, Shinmura T, et al. Magnetic abrasive finishing of rollers. CIRP Annals—Manufacturing Technology, 1994, 43(1): 181–184CrossRefGoogle Scholar
  51. 51.
    Tani Y, Kawata K, Nakayama K. Development of high-efficient fine finishing process using magnetic fluid. CIRP Annals—Manufacturing Technology, 1984, 33(1): 217–220CrossRefGoogle Scholar
  52. 52.
    Suzuki K, Ide A, Uematsu T, et al. Electrophoresis-polishing with a partial electrode tool. In: Proceedings of the International Symposium on Advances in Abrasive Technology. 1997, 48–52CrossRefGoogle Scholar
  53. 53.
    Martin H M, Allen R G, Burge J H F, et al. Fabrication of mirrors for the Magellan telescopes and large binocular telescope. SPIE Proceedings, Large Ground-based Telescopes, 2003, 4837: 1–10CrossRefGoogle Scholar
  54. 54.
    Kim D W, Burge J H. Rigid conformal polishing tool using nonlinear visco-elastic effect. Optics Express, 2010, 18(3): 2242–2257CrossRefGoogle Scholar
  55. 55.
    Walker D D, Brooks D, King A, et al. The “precessions” tooling for polishing and figuring flat, spherical and aspheric surfaces. Optical Express, 2003, 11(8): 958–964CrossRefGoogle Scholar
  56. 56.
    Walker D D, Beaucamp A T H, Binghama R G, et al. Precessions aspheric polishing: New results from the development program. SPIE Proceedings, Optical Manufacturing and Testing V, 2003, 5180: 15–28CrossRefGoogle Scholar
  57. 57.
    Jacobs S, Arrasmith S, Kozhinova I. An overview of magnetorheological finishing (MRF) for precision optics manufacturing. Ceramic Transactions, 1999, 102: 185–199Google Scholar
  58. 58.
    Booij S M. Fluid jet polishing—Possibilities and limitations of a new fabrication technique. Dissertation for the Doctoral Degree. Delft: Delft University of Technology, 2003Google Scholar
  59. 59.
    Beaucamp A, Freeman R, Morton R, et al. Removal of diamondturning signatures on x-ray mandrels and metal optics by fluid-jet polishing. SPIE Proceedings, Advanced Optical and Mechanical Technologies in Telescopes and Instrumentation, 2008, 7018: 701835CrossRefGoogle Scholar
  60. 60.
    Shorey A, Kordonski W, Tricard M. Deterministic precision finishing of domes and conformal optics. SPIE Proceedings, Window and Dome Technologies and Materials IX, 2005, 5786: 310–318CrossRefGoogle Scholar
  61. 61.
    Tricard M, Kordonski W I, Shorey A B, et al. Magnetorheological jet finishing of conformal, freeform and steep concave optics. CIRP Annals—Manufacturing Technology, 2006, 55(1): 309–312CrossRefGoogle Scholar
  62. 62.
    Cheng Y, Fang F, Zhang X. Ultra-precision turning of aspheric mirrors using error-decreasing amendment method. Optical Technique, 2010, 36(1): 51–55 (in Chinese)Google Scholar
  63. 63.
    Fang F, Liu X, Lee L. Micro-machining of optical glasses—A review of diamond-cutting glasses. Sadhana, 2003, 28(5): 945–955CrossRefGoogle Scholar
  64. 64.
    Guan C, Tie G, Yin Z. Fabrication of array lens optical component by using of slow tool servo diamond turning. Journal of National University of Defense Technology, 2009, 31(4): 31–47 (in Chinese)Google Scholar
  65. 65.
    Li L, Yi A Y, Huang C, et al. Fabrication of diffractive optics by use of slow tool servo diamond turning process. Optical Engineering, 2006, 45(11): 113401CrossRefGoogle Scholar
  66. 66.
    Lee W B, Cheung C F, To S, et al. Integrated manufacturing technology for design, machining and measurement of freeform optics. Journal of Mechanical Engineering, 2010, 46(11): 137–148CrossRefGoogle Scholar
  67. 67.
    Zhou P, Xu S, Wang Z, et al. A load identification method for the grinding damage induced stress (GDIS) distribution in silicon wafers. International Journal of Machine Tools and Manufacture, 2016, 107(8): 1–7CrossRefGoogle Scholar
  68. 68.
    Huang Y, Huang Z. Modern Abrasive Belt Grinding Technology and Engineering Application. Chongqing: Chongqing University Press, 2009 (in Chinese)Google Scholar
  69. 69.
    Zhang F. Fabrication and testing of precise off-axis convex aspheric mirror. Optics and Precision Engineering, 2010, 18(12): 2557–2563Google Scholar
  70. 70.
    Dai Y, Shang W, Zhou X. Effect of the material of a small tool to removal function in computer control optical polishing. Journal of National University of Defense Technology, 2006, 28(2): 97–101 (in Chinese)Google Scholar
  71. 71.
    Shun X, Zhang F, Dong S. Research on remove model and algorithm of resident time for magnetorheological finishing. New Technology & New Process, 2006, (2): 73–75 (in Chinese)Google Scholar
  72. 72.
    Liao W, Dai Y, Zhou L, et al. Optical surface roughness in ion beam process. Journal of Applied Optics, 2010, 31(6): 1041–1045 (in Chinese)Google Scholar
  73. 73.
    Guo P, Fang H, Yu J. Research on material removal mechanism of fluid jet polishing. Laser Journal, 2008, 29(1): 25–27 (in Chinese)Google Scholar
  74. 74.
    Zhang X, Dai Y, Li S. Study on magnetorheological jet polishing technology. Machinery Design & Manufacture, 2007, (12): 114–116 (in Chinese)Google Scholar
  75. 75.
    Zhang J, Wang B, Dong S. Application of atmospheric pressure plasma polishing method in machining of silicon ultra smooth surface. Optics and Precision Engineering, 2007, 15(11): 1749–1755 (in Chinese)Google Scholar
  76. 76.
    Zhang Y, Feng Z, Wang Y. Study of magnetorheological brush finishing (MRBF) for concave surface of conformal optics. In: Proceedings of the 8th China-Japan International Conference on Ultra-Precision Machining. Hangzhou, 2011Google Scholar
  77. 77.
    Hong T. Research on the machining mechanics of EMR effect-based tiny-grinding wheel. Dissertation for the Doctoral Degree. Guangzhou: Guangdong University of Technology, 2008Google Scholar
  78. 78.
    Li M, Lyu B H, Yuan J, et al. Shear-thickening polishing method. International Journal of Machine Tools and Manufacture, 2015, 94: 88–99CrossRefGoogle Scholar
  79. 79.
    Zhao T, Deng Q, Yuan J, et al. An experimental investigation of flat polishing with dielectrophoretic (DEP) effect of slurry. International Journal of Advanced Manufacturing Technology, 2016, 84(5–8): 1737–1746Google Scholar
  80. 80.
    Yuan J, Wang Z, Hong T, et al. A semi-fixed abrasive machining technique. Journal of Micromechanics and Microengineering, 2009, 19(5): 054006CrossRefGoogle Scholar
  81. 81.
    Qi J, Luo J, Wang K, et al. Mechanical and tribological properties of diamond-like carbon films deposited by electron cyclotron resonance microwave plasma chemical vapor deposition. Tribology Letters, 2003, 14(2): 105–109CrossRefGoogle Scholar
  82. 82.
    Su J, Guo D, Kang R, et al. Modeling and analyzing on nonuniformity of material removal in chemical mechanical polishing of silicon wafer. Materials Science Forum, 2004, 471–472: 26–31CrossRefGoogle Scholar
  83. 83.
    Yuan J, Chen L, Zhao P, et al. Study on sphere shaping mechanism of ceramic ball for lapping process. Key Engineering Materials, 2004, 259–260: 195–200CrossRefGoogle Scholar
  84. 84.
    Zhou F, Yuan J, Lyu B H, et al. Kinematics and trajectory in processing precision balls with eccentric plate and variable-radius V-groove. International Journal of Advanced Manufacturing Technology, 2016, 84(9–12): 2167–2178CrossRefGoogle Scholar

Copyright information

© Higher Education Press and Springer-Verlag GmbH Germany 2017

Authors and Affiliations

  • Julong Yuan
    • 1
    • 2
  • Binghai Lyu
    • 1
    • 2
  • Wei Hang
    • 1
    • 2
  • Qianfa Deng
    • 1
    • 2
  1. 1.Ultra-precision Machining CenterZhejiang University of TechnologyHangzhouChina
  2. 2.Key Laboratory of E&MZhejiang University of Technology (Ministry of Education and Zhejiang Province)HangzhouChina

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