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A multi-probe micro-fabrication apparatus based on the friction-induced fabrication method

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Abstract

A novel multi-probe micro-fabrication apparatus was developed based on the friction-induced fabrication method. The main parts of the apparatus include actuating device, loading system, and control system. With a motorized XY linear stage, the maximum fabrication area of 50 mm × 50 mm can be achieved, and the maximum sliding speed of probes can be as high as 10 mm/s. Through locating steel micro balls into indents array, the preparation of multi-probe array can be realized by a simple and low-cost way. The cantilever was designed as a structure of deformable parallelogram with two beams, by which the fabrication force can be precisely controlled. Combining the friction-induced scanning with selective etching in KOH solution, various micro-patterns were fabricated on Si(100) surface without any masks or exposure. As a low-cost and high efficiency fabrication device, the multi-probe micro-fabrication apparatus may encourage the development of friction-induced fabrication method and shed new light on the texture engineering.

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Authors and Affiliations

  1. Tribology Research Institute, Key Laboratory of Advanced Technologies of Materials, Ministry of Education, Southwest Jiaotong University, Chengdu, 610031, China

    Zhijiang Wu, Chenfei Song, Jian Guo, Bingjun Yu & Linmao Qian

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  1. Zhijiang Wu
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  2. Chenfei Song
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  3. Jian Guo
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  4. Bingjun Yu
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  5. Linmao Qian
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Correspondence to Linmao Qian.

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Wu, Z., Song, C., Guo, J. et al. A multi-probe micro-fabrication apparatus based on the friction-induced fabrication method. Front. Mech. Eng. 8, 333–339 (2013). https://doi.org/10.1007/s11465-013-0276-4

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  • DOI: https://doi.org/10.1007/s11465-013-0276-4

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