Abstract
Using an appropriate control method, linear ultrasonic motors can be used in applications requiring high position accuracy. In this paper, a closed loop PI control system is designed to achieve high position accuracy during the control of a two-DOF stage driven by linear ultrasonic motors. Two ultrasonic motors are mounted on the stage to generate motion in two orthogonal directions. The PI control algorithm is used to increase the stability and accuracy of position control. The x-axis mover covers 30 mm forward and backward in less than 0.3 s settling time and the y-axis mover in less than 0.4 s. Experimental results denote that the control strategy proposed in this paper appears to have high efficiency, quick response, and high accuracy.
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Zhao Chunsheng. Research on ultrasonic motors in Nanjing University of Aeronautics and Astronautics. Journal of Vibration, Measurement and Diagnosis, 2005, 25(3): 167–173
Chen Zhihua, Zhao Chunsheng. Some key problems in controlling the ultrasonic motors. Small and Special Machines, 2002, 6(9): 23–25
Yan Han, Wang Xiankui, Duan Guanghong. Research on the control systems of a precision linear motor drive device. Frontiers of Mechanical Engineering in China, 2006, 1(3): 260–264
Zhao Chunsheng. Some proposals for development of ultrasonic motor techniques in China. Micromotors, 2006, 39(2): 64–67
Tobias Hemsel, Joőrg Wallaschek. Survey of the present state of the art of piezoelectric linear motors. Ultrasonics, 2000, 38: 37–40
Ueha S, Tomikava Y, Kurosawa M, Nakamura N. UltrasonicMotors, Theory and Applications. Oxford: Clarendon Press, 1993
Valentinas S. Ultrasonic actuators for nanometre positioning. Ultrasonics, 2000, 38: 20–25
Lim C K, He Siyuan, Chen I M, et al. A piezo-on-slider type linear ultrasonic motor for the application of positioning stages. In: Proceedings of the 1999 IEEE/ASME, International Conference on Advanced Intelligent Mechatronics. Atlanta, USA, 1999
Zhu Hua, Chen Chao, Zhao Chunsheng. Investigation on a cylindrical ultrasonic micromotor. Frontiers of Mechnical Engineering in China, 2007, 2(4): 394–398
He Honglin, Zhao Chunsheng. Study on the control of the robot driven by ultrasonic motors. Piezoelectrics and Acoustooptics, 2005, 27(6): 694–697
Zeng Jinsong, Yao Zhiyuan, Zhao Chunsheng. Realization of measurement and control system for ultrasonic motor. Transducer and Microsystem Technologies, 2006, 25(7): 64–66
He Honglin, Zhu Hua, Zhao Chunsheng. Position control of an ultrasonic motor using Fussy-PI technique. Mechanical Science and Technology, 2006, 25(5): 603–607
Zhao Chunsheng. Ultrasonic Motors Technologies and Application. Beijing: Science Press, 2007
Xia Changliang, Wang Mengli, Wang Xiangcun. Study on driving circuit of the ultrasonic motor. In: Proceedings of the IEEE International Conference on Mechatronics and Automation. Niagara Falls, Canada, 2005: 2165–2168
Feng Jinzhi, Zheng Songlin, Yu Fan. Bandwidth-limited active suspension controller for an off-road vehicle based on co-simulation technology. Frontiers of Mechanical Engineering in China, 2008, 3(1): 111–117
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Zhang, H., Shi, Y. & Zhao, C. Precision control system of two-DOF stage with linear ultrasonic motor. Front. Mech. Eng. China 3, 421–425 (2008). https://doi.org/10.1007/s11465-008-0063-9
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DOI: https://doi.org/10.1007/s11465-008-0063-9