Skip to main content
SpringerLink
Log in

Flow behavior of liquid-solid coupled system of piezoelectric micropump

  • Research Article
  • Published:
Frontiers of Mechanical Engineering in China Aims and scope Submit manuscript

Abstract

This paper employs a shallow water model and the finite element method to approximate periodical flows of a micropump to a two-dimensional thickness-averaged flow. A liquid-solid coupled system equation of the micropump is presented. Through the mode analysis of the liquid-solid coupled system, the first-order natural frequency, diaphragm vibration shape and amplitude-frequency relationship are obtained. The vibration response of the diaphragm is calculated when an external electric field is applied. Based on the thickness-averaged flow equation, the periodical flow of the micropump is studied using the finite volume method to investigate the flow behavior and flow rate-frequency characteristics. Numerical results indicate that an optimal working frequency can be obtained, at which the flow rate of the micropump achieves the maximum when the external electric voltage is fixed.

This is a preview of subscription content, log in via an institution to check access.

Access this article

Log in via an institution

Price excludes VAT (USA)
Tax calculation will be finalised during checkout.

Instant access to the full article PDF.

Institutional subscriptions

Similar content being viewed by others

References

  1. Tay F E H. Microfluidics and bioMEMS applications, Boston: Kluwer Academic Publishers, 2002, 1st Edition

    Google Scholar 

  2. Stemme E, Stemme G. A valve-less diffuser/nozzle-based fluid pump. Sensors and Actuators A, 1993, 39(2): 159–167

    Article  Google Scholar 

  3. Laser D J, Santiago J G. A review of micropumps. J Micromech Microeng. 2004, 14(I.6): 35–64

    Article  Google Scholar 

  4. Vishal S, Suresh V, Garimella J. et al. Low Reynolds number flow Through nozzle-diffuser elements in valveless micropumps. Sensors and Actuators A, 2004, 113(2): 94–103

    Google Scholar 

  5. Michael K, Alan E. Microfluidics technology and application. Research Studies Press Ltd, 2000, 1st Edition

  6. Olsson A, Stemme G, Stemme E. A valve-less planer fluid pump with two chambers. Sensors and Actuators A, 1995, 46(3): 549–556

    Article  Google Scholar 

  7. Ullmann A, Fono I, Taitel Y. A piezoelectric valve-less pump-dynamic model. Journal of Fluids Engineering, 2001, 23(I.1): 92–97

    Article  Google Scholar 

  8. Ullmann A, Fono I. The piezoelectric valve-less pump — improved dynamic model. Journal of Microelectromechanical Systems, 2002, 11(I.6): 655–664

    Article  Google Scholar 

  9. Olsson A, Stemme G, Stemme E. A numerical design study of the valveless diffuser pump using a lumped-mass modal. J Micromech MicroEng, 1999, 9(I.1): 34–44

    Article  Google Scholar 

  10. Ullman A. The piezoelectric valve-less pump-performance enhancement analysis. Sensors And Actuators A, 1998, 69(I.1): 97–105

    Article  Google Scholar 

  11. Pan L S, Ng T Y, Liu G R. Analytical solutions for the dynamic analysis of a valveless micropump—a fluid-membrane coupling study. Sensors and Actuators A, 2001, 93(2): 173–181

    Article  Google Scholar 

  12. Zhang Y L, Wu J K. Numerical study of periodical flows of piezoelectric valveless micropump for biochips. Applied Math And Mech, 2005, 26(8): 1026–1033

    Article  Google Scholar 

  13. Wang P, Han Z X, Zhang J Y. Complete Handbook of Fluid Mechanics. Beijing: Beijing University of Aeronautics and Astronautics, 1991

    Google Scholar 

  14. Wu J K, Lu L J. Liquid-Solid coupled system of micropumps. Acta Mechanica Solida, 2006, 18(4): 301–308

    Google Scholar 

Download references

Author information

Authors and Affiliations

  1. Wuhan National Laboratory for Optoelectronics, Mechanics Department, Huazhong University of Science & Technology, Wuhan, 430074, China

    Lijun Lu & Jiankang Wu

Authors
  1. Lijun Lu
    View author publications

    You can also search for this author in PubMed Google Scholar

  2. Jiankang Wu
    View author publications

    You can also search for this author in PubMed Google Scholar

Corresponding author

Correspondence to Jiankang Wu.

Additional information

__________

Translated from Journal of Hydrodynamics, 2006, 21(4): 512–518 [译自: 水动力学研究与进展]

Rights and permissions

Reprints and permissions

About this article

Cite this article

Lu, L., Wu, J. Flow behavior of liquid-solid coupled system of piezoelectric micropump. Front. Mech. Eng. China 3, 50–54 (2008). https://doi.org/10.1007/s11465-008-0003-8

Download citation

  • Issue Date:

  • DOI: https://doi.org/10.1007/s11465-008-0003-8

Keywords

Search

Navigation