Abstract
A new mini-spectrophotometer is developed by adopting micro-silicon-slit and micro-silicon-fixer, which are based on micro electro-mechanical systems (MEMS) technology. Both the micro-silicon-slit and the micro-silicon-fixer have their own features, such as small volume and high precision, which are laid out and analyzed later. Meantime, through the analysis of the sample cell’s optical characteristics that have some impacts on the linearity of the spectrophotometer, a relationship equation, which is about the impact of the refractive index of the sample cell and the tested medium on the variety of the transmitted light intensity and the absorbency, is put forward. When the water and the air are taken as the referenced medium, the experiments demonstrate that the difference of the refractive index of the references does not influence the correlation coefficient r and the slope of the absorbency-concentration curve. The final results show that the new mini-spectrophotometer with micro-silicon-slit and micro-silicon-fixer is worked out, its correlation coefficient r > 0.999, and its refractive index resolving power is better than 0.01.
Similar content being viewed by others
References
Kaye W L. A universal spectrophotometer. Applied Optics, 1963, 2(12): 1295–1302
Brennan D, Alderman J, Sattler L, et al. Development of a micro-spectrometer system for process control application. Infrared Physics & Technology, 2002, 43: 69–76
Jin G F, Zhou Z Y. Miniaturization integration and intelligence of instruments. Modern Scientific Instruments, 2000, (3): 7–8 (in Chinese)
Schmidt W. A high performance micro-dual-wavelength-spectrophotometer (MDWS). Journal of Biochemical and Biophysical Methods, 2004, 58: 15–24
Brown C W, Lin J. Interfacing a fiber-optics probe to a diode array UV-Visible spectrophotometer for drug dissolution tests. Applied optics, 1993, 47(5): 615–618
Zhou L Q, Wu Y H, Zhang P, et al. A new mini-fiber-spectrometer by adopting micro-silicon-slit. Optics and Precision Engineering, 2005, 13(6): 637–642 (in Chinese)
Huang M Zh, Ni Y, Lin F, et al. Development of high speed UV-Vis spectrophotometer. Spectroscopy and Spectral Analysis, 2005, 25(6): 938–941 (in Chinese)
Luo Q, Deng Y Z, Chai R X, et al. The Spectrophotometer Analysis. Beijing: Science Press, 1998, 57–60 (in Chinese)
Li Sh X, Wu Y H, Xuan M. Dynamic numerical simulation of an electromagnetic micro fluidic active mixer. Optics and Precision Engineering, 2005, 13(2): 127–134 (in Chinese)
Wang J. Electro Photometer and Spectrophotometer Analysis. Beijing: China Measurement Press, 1993, 4: 67–70 (in Chinese)
Yu D Y, Tan H Y. Engineering Optics. Beijing: Mechanical Industry Press, 2003, 39–40, 189–194 (in Chinese)
Linear absorbency liquid. Testing Report: 2005-(03)-001. Beijing: National Research Center for Certified Reference Materials, 2005 (in Chinese)
Fei Y T. Error Theory and Data Processing. Beijing: Mechanical Industry Press, 2005, 121–131, 140 (in Chinese)
Jin P T. Probability Theory and Data statistics. Beijing: High Education Press, 2000, 146–150 (in Chinese)
Author information
Authors and Affiliations
Corresponding author
Additional information
__________
Translated from Optics and Precision Engineering, 2006, 14(6): 990–997 [译自: 光学精密工程]
Rights and permissions
About this article
Cite this article
Zhou, L., Wu, Y., Zhang, P. et al. Micro-spectrophotometer based on micro electro-mechanical systems technology. Front. Mech. Eng. China 3, 37–43 (2008). https://doi.org/10.1007/s11465-008-0001-x
Issue Date:
DOI: https://doi.org/10.1007/s11465-008-0001-x