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Fabrication and properties of anodic alumina humidity sensor with through-hole structure

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  • Condensed Matter Physics
  • Published:
Chinese Science Bulletin

Abstract

Through-hole structural humidity sensor was fabricated by radio-frequency magnetron sputtering deposition of gold electrodes on two sides of anodic aluminum oxide (AAO) membranes which were prepared by two-step anodization procedure at 0–5°C and 40 V in 0.5 mol/L oxalic acid electrolyte. The investigation on the impedance at various humid conditions showed a linear relationship between impedance and relative humidity over the range of 12%–97% RH. Other excellent properties such as rapid response and good reproducibility were also obtained.

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Authors and Affiliations

  1. Department of Electronic Materials Science and Engineering, Institute of Materials, South China University of Technology, Guangzhou, 510640, China

    Ling ZhiYuan, Chen ShuoShuo, Wang JinChi & Li Yi

Authors
  1. Ling ZhiYuan
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  2. Chen ShuoShuo
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  3. Wang JinChi
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  4. Li Yi
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Corresponding author

Correspondence to Ling ZhiYuan.

Additional information

Supported by the research fund of Key Lab of Specially Functional Materials, Ministry of Education, China

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Ling, Z., Chen, S., Wang, J. et al. Fabrication and properties of anodic alumina humidity sensor with through-hole structure. Chin. Sci. Bull. 53, 183–187 (2008). https://doi.org/10.1007/s11434-008-0008-z

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  • DOI: https://doi.org/10.1007/s11434-008-0008-z

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